Selective thin-film deposition for optofluidic platforms with optimized transmission

IEEE Photonics Technology Letters

Volumn 23, Issue 11, 2011, Pages 721-723

  Phillips, Brian S ^a   Jenkins, Micah H ^a   Liu, Shuo ^b   Schmidt, Holger ^b   Hawkins, Aaron R ^a  

^a Brigham Young University   (United States)

^b University of California Santa Cruz   (United States)

Author keywords

Fabrication; optical waveguides; thin films

Indexed keywords

DIELECTRIC THIN FILMS; FABRICATION METHOD; HOLLOW-CORE; HOLLOW-CORE WAVEGUIDES; LOW LOSS; OPTOFLUIDIC BIOSENSOR; POLYMETHYLGLUTARIMIDE; SELECTIVE DEPOSITION; THIN-FILM DEPOSITIONS; THROUGHPUT IMPROVEMENT;

BIOSENSORS; DEPOSITION; DIELECTRIC FILMS; THIN FILMS; WAVEGUIDES;

VAPOR DEPOSITION;

EID: 79956286322     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2011.2132125     Document Type: Article

References (11)

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