Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser

Optics Letters

Volumn 36, Issue 7, 2011, Pages 1176-1178

  Imamoto, Hiroshi ^a   Kanehira, Shingo ^b   Wang, Xi ^b   Kametani, Keisuke ^b   Sakakura, Masaaki ^b   Shimotsuma, Yasuhiko ^b   Miura, Kiyotaka ^b   Hirao, Kazuyuki ^b  

^a OMRON CORPORATION   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION STRUCTURES; CONCAVE STRUCTURES; FEMTO-SECOND LASER; HUMAN BODIES; INFRARED RAYS; IR SENSOR; SEM;

INFRARED DETECTORS; INFRARED RADIATION; LIGHT REFLECTION; OPTICAL SYSTEMS; RAMAN SPECTROSCOPY; SENSORS; ULTRASHORT PULSES;

INFRARED LASERS;

EID: 79956141858     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.36.001176     Document Type: Article

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