Application of reconfigurable pinhole mask with excimer laser to fabricate microfluidic components

Microfluidics and Nanofluidics

Volumn 10, Issue 6, 2011, Pages 1247-1256

  Conlisk, Kevin ^a   Favre, Sébastian ^b   Lasser, Theo ^c   O'Connor, Gerard M ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

^b Swiss Manufacturing Operation ^*  (Switzerland)

^c BM 5143 (Btiment BM)   (Switzerland)

Author keywords

Excimer laser; Intelligent pinhole mask; Microfluidic mixer; PMMA; Prediction model

Indexed keywords

CHANNEL GEOMETRY; DEVICE GEOMETRIES; ETCH RATES; IN-LINE; LOW REYNOLDS NUMBER; MICROCHANNEL GEOMETRIES; MICROFLUIDIC COMPONENTS; MICROFLUIDIC GEOMETRY; MICROFLUIDIC MIXER; PINHOLE MASKS; PMMA; PREDICTION MODEL; QUANTITATIVE MEASUREMENT; RE-CONFIGURABLE; SCANNING LASERS; SCANNING STAGES; SIDEWALL ANGLES; VISUALISATION;

ABLATION; COMPUTATIONAL FLUID DYNAMICS; COMPUTATIONAL GEOMETRY; ESTERS; EXCIMER LASERS; LASER ABLATION; LASER APPLICATIONS; MATHEMATICAL MODELS; MICROCHANNELS; MICROFLUIDICS; MIXING; REYNOLDS NUMBER; SCANNING; VISUALIZATION;

GAS LASERS;

EID: 79956080247     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-010-0755-4     Document Type: Article

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