SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 81, Issue 8, 2002, Pages 1441-1443

Theoretical and experimental investigation of boron diffusion in polycrystalline HfO2 films

(1) Liu, Chun Li a

a MOTOROLA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AB INITIO MODELING; B DIFFUSION; BORON DIFFUSIONS; BULK DIFFUSIONS; CONCENTRATION PROFILES; EXPERIMENTAL INVESTIGATIONS; GATE STACKS; GRAIN-BOUNDARY DIFFUSION; MODELING PREDICTIONS; MODELING RESULTS; POLYCRYSTALLINE; SECONDARY ION MASS SPECTROSCOPY;

ACTIVATION ENERGY; BORON; BORON COMPOUNDS; DIFFUSION IN SOLIDS; GRAIN BOUNDARIES; POLYSILICON; SECONDARY ION MASS SPECTROMETRY;

HAFNIUM OXIDES;

EID: 79956053087 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1501766 Document Type: Article

Times cited : (20)

References (12)

1
- 0035872897
- jaJAPIAU 0021-8979
- G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001). jap JAPIAU 0021-8979
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

2
- 0032139019
- edl EDLEDZ 0741-3106
- M. Cao, P. B. Voorde, M. Cox, and W. Greene, IEEE Electron Device Lett. 19, 291 (1998). edl EDLEDZ 0741-3106
- (1998) IEEE Electron Device Lett. , vol.19 , pp. 291
- Cao, M.¹ Voorde, P.B.² Cox, M.³ Greene, W.⁴

3
- 12844286241
- prb PRBMDO 0163-1829
- G. Kresse, Phys. Rev. B 47, 558 (1993); prb PRBMDO 0163-1829
- (1993) Phys. Rev. B , vol.47 , pp. 558
- Kresse, G.¹

4
- 85006896209
- prb PRBMDO 0163-1829
- 49, 14251 (1994); prb PRBMDO 0163-1829
- (1994) , vol.49 , pp. 14251

5
- 0030190741
- G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996); cmt CMMSEM 0927-0256
- (1996) Comput. Mater. Sci. , vol.6 , pp. 15
- Kresse, G.¹ Furthmüller, J.²

6
- 0001251555
- prb PRBMDO 0163-1829
- Phys. Rev. B 55, 011169 (1996). prb PRBMDO 0163-1829
- (1996) Phys. Rev. B , vol.55 , pp. 11169

7
- 0000220710
- edited by B. J. Berne, G. Ciccotti, and D. F. Coker (World Scientific, Singapore
- H. Jónsson, G. Mills, and K. W. Jacobsen, in Classical and Quantum Dynamics in Condensed Phase Simulations, edited by B. J. Berne, G. Ciccotti, and D. F. Coker (World Scientific, Singapore, 1998), p. 385.
- (1998) Classical and Quantum Dynamics in Condensed Phase Simulations , pp. 385
- Jónsson¹

8
- 0001111165
- apl APPLAB 0003-6951
- R. Stumpf, C.-L. Liu, and C. Tracy, Appl. Phys. Lett. 75, 1389 (1999). apl APPLAB 0003-6951
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1389
- Stumpf, R.¹ Liu, C.-L.² Tracy, C.³

9
- 0000614867
- apl APPLAB 0003-6951
- C.-L. Liu, L. J. Borucki, T. Merchant, M. Stoker, and A. Korkin, Appl. Phys. Lett. 76, 885 (2000). apl APPLAB 0003-6951
- (2000) Appl. Phys. Lett. , vol.76 , pp. 885
- Liu, C.-L.¹ Borucki, L.J.² Merchant, T.³ Stoker, M.⁴ Korkin, A.⁵

10
- 0027311545
- amm AMATEB 0956-7151
- Q. Ma, C. L. Liu, J. B. Adasms, and R. W. Balluffi, Acta Metall. Mater. 41, 143 (1993). amm AMATEB 0956-7151
- (1993) Acta Metall. Mater. , vol.41 , pp. 143
- Ma, Q.¹ Liu, C.L.² Adasms, J.B.³ Balluffi, R.W.⁴

11
- 0142127055
- T. J. Press (Padstow), Padstow, Cornwall
- D. A. Porter and K. E. Easterling, Phase Transformations in Metals and Alloys [T. J. Press (Padstow), Padstow, Cornwall, 1987].
- (1987) Phase Transformations in Metals and Alloys
- Porter, D.A.¹ Easterling, K.E.²

12
- 0026203583
- sus SUSCAS 0039-6028
- C. L. Liu, J. M. Cohen, J. B. Adams, and A. F. Voter, Surf. Sci. 253, 334 (1991). sus SUSCAS 0039-6028
- (1991) Surf. Sci. , vol.253 , pp. 334
- Liu, C.L.¹ Cohen, J.M.² Adams, J.B.³ Voter, A.F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.