Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges

Applied Physics Letters

Volumn 80, Issue 9, 2002, Pages 1526-1528

  Takaki, K ^a   Koseki, D ^a   Fujiwara, T ^a  

^a IWATE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GLOW DISCHARGES; CAPACITIVELY COUPLED; CURRENT MEASUREMENTS; DISCHARGE CHAMBER; DISK ELECTRODE; ELECTRICAL POWER CONSUMPTION; GAP LENGTH; GAS PRESSURES; GLASS SUBSTRATES; GROUNDED ELECTRODES; HEAT FLUX DISTRIBUTIONS; HIGH-SENSITIVITY; LASER INTERFEROMETER; MAXIMUM HEAT FLUX; RADIAL ELECTRON DENSITY; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES;

ARGON; CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; GLOW DISCHARGES; INTERFEROMETERS; LASER INTERFEROMETRY; REFRACTIVE INDEX; SUBSTRATES;

HEAT FLUX;

EID: 79956045334     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1456551     Document Type: Article

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