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Volumn 80, Issue 6, 2002, Pages 938-940

Amorphous layer formation at the TaC/Cu interface in the Si/TaC/Cu metallization system

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS LAYER; AS-DEPOSITED FILMS; METALLIZATION SYSTEMS; THERMODYNAMIC EVALUATION;

METALLIZING; TANTALUM;

TANTALUM OXIDES;

EID: 79956043837 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1447601 Document Type: Article

Times cited : (27)

References (14)

1
- 0000684975
- apl APPLAB 0003-6951
- K. Holloway and P. Fryer, Appl. Phys. Lett. 57, 1736 (1990). apl APPLAB 0003-6951
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1736
- Holloway, K.¹ Fryer, P.²

2
- 0008988230
- jaJAPIAU 0021-8979
- K. Holloway, P. Fryer, C. Cabral, J. Harper, P. Bailey, and K. Kelleher, J. Appl. Phys. 71, 5433 (1992). jap JAPIAU 0021-8979
- (1992) J. Appl. Phys. , vol.71 , pp. 5433
- Holloway, K.¹ Fryer, P.² Cabral, C.³ Harper, J.⁴ Bailey, P.⁵ Kelleher, K.⁶

3
- 0031152731
- tsf THSFAP 0040-6090
- J. Imahori, T. Oku, and M. Murakami, Thin Solid Films 301, 142 (1997). tsf THSFAP 0040-6090
- (1997) Thin Solid Films , vol.301 , pp. 142
- Imahori, J.¹ Oku, T.² Murakami, M.³

4
- 20244366040
- 24-28 April, (Materials Research Society, 2000)
- T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, and I. Suni, 2000 MRS Spring Meeting, San Francisco, CA, 24-28 April, (Materials Research Society, 2000), Vol. 612, p. 97.
- (2000) MRS Spring Meeting, San Francisco, CA , vol.612 , pp. 97
- Laurila, T.¹ Zeng, K.² Kivilahti, J.K.³ Molarius, J.⁴ Suni, I.⁵

5
- 79957940700
- (submitted)
- T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, and I. Suni, J. Appl. Phys. (submitted).
- J. Appl. Phys.
- Laurila, T.¹ Zeng, K.² Kivilahti, J.K.³ Molarius, J.⁴ Suni, I.⁵

6
- 0001750999
- nib NIMBEU 0168-583X
- J. Saarilahti and E. Rauhala, Nucl. Instrum. Methods Phys. Res. B 64, 734 (1992). nib NIMBEU 0168-583X
- (1992) Nucl. Instrum. Methods Phys. Res. B , vol.64 , pp. 734
- Saarilahti, J.¹ Rauhala, E.²

7
- 0035494708
- jmr JMREEE 0884-2914
- T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, and I. Suni, J. Mater. Res. 16, 2939 (2001). jmr JMREEE 0884-2914
- (2001) J. Mater. Res. , vol.16 , pp. 2939
- Laurila, T.¹ Zeng, K.² Kivilahti, J.K.³ Molarius, J.⁴ Suni, I.⁵

8
- 0000829447
- zem ZEMTAE 0044-3093
- E. Gebhardt and H. D. Sehezzi, Z. Metallkd. 50, 521 (1952). zem ZEMTAE 0044-3093
- (1952) Z. Metallkd. , vol.50 , pp. 521
- Gebhardt, E.¹ Sehezzi, H.D.²

9
- 0001511409
- jco JCOMAH 0022-5088
- H. Jehn and E. Olzi, J. Less-Common Met. 27, 297 (1972). jco JCOMAH 0022-5088
- (1972) J. Less-Common Met. , vol.27 , pp. 297
- Jehn, H.¹ Olzi, E.²

10
- 0016070909
- 8q5 MTGTBF 0026-086X
- S. Stecura, Metall. Trans. 5, 1337 (1974). 8q5 MTGTBF 0026-086X
- (1974) Metall. Trans. , vol.5 , pp. 1337
- Stecura, S.¹

11
- 0001210446
- scr SCRMBU 0036-9748
- R. Lauf and C. Altstetter, Scr. Metall. 11, 938 (1977). scr SCRMBU 0036-9748
- (1977) Scr. Metall. , vol.11 , pp. 938
- Lauf, R.¹ Altstetter, C.²

12
- 0019683355
- jpx JPCSAW 0022-3697
- G. Boreau and P. Gerdanian, J. Phys. Chem. Solids 42, 749 (1981). jpx JPCSAW 0022-3697
- (1981) J. Phys. Chem. Solids , vol.42 , pp. 749
- Boreau, G.¹ Gerdanian, P.²

13
- 0942289180
- edited by H. Jain and D. Gupta (TMS, Warrendale, PA)
- M.-A. Nicolet, in Diffusion in Amorphous Materials, edited by H. Jain and D. Gupta (TMS, Warrendale, PA, 1994), pp. 225-234.
- (1994) Diffusion in Amorphous Materials , pp. 225-234
- Nicolet, M.-A.¹

14
- 0942289185
- ado AMETAR 0001-6160
- J. Burke, Acta Metall. 10, 501 (1962). ado AMETAR 0001-6160
- (1962) Acta Metall. , vol.10 , pp. 501
- Burke, J.¹

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