Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

Integrated Ferroelectrics

Volumn 41, Issue 1-4, 2001, Pages 81-90

  Rabson, Thomas A ^a   Lee, Jiun Ting ^a   Lee, Tai Chou ^a   Wang, Shunxi ^a   Robert, Marc A ^a  

^a Rice University   (United States)

Author keywords

Diamond; Lithium Niobate; Surface acoustic wave

Indexed keywords

DEVICE APPLICATION; ELECTROMECHANICAL COUPLING COEFFICIENTS; INTERDIGITAL TRANSDUCER; LITHIUM NIOBATE; LITHIUM NIOBATE THIN FILMS; METAL ORGANIC DECOMPOSITION; MULTILAYER STRUCTURES; POLYCRYSTALLINE; PROPAGATION VELOCITIES; SAW DEVICE; SURFACE ACOUSTIC WAVE PROPAGATION; SURFACE ACOUSTIC WAVES; THEORETICAL CALCULATIONS;

ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; CRYSTALLOGRAPHY; DIAMONDS; ELECTROMECHANICAL COUPLING; FILM PREPARATION; FREQUENCY RESPONSE; THIN FILMS; ULTRASONIC TRANSDUCERS; X RAY DIFFRACTION ANALYSIS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 79957964144     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580108012810     Document Type: Article

References (14)

1. Yoonkee Kim, William D. Hunt, Frederick S. Hicknell, Robert J. Higgins, and Cheng-Kuei Jen, IEEE Transactions on Ultrasonics. Ferroelectrics, and Frequency Control 42. 351 (1995).
2. Eric L. Adler, IEEE Transactions on Ultrasonics. Ferroelectrics. and Frequency Control 37, 485 (1990).
3. S. D. Wolter, B. R. Stoner, J. T. Glass, P. J. Ellis, D. S. Buhaenko, C. E. Jenkins, and P. Southworth, Appl. Phvs. Lett. 62, 1215 (1993).
4. B. R. Stoner, S. R. Sahaida, J. P. Bade, P. Southworth, and P. J. Ellis. J. Mater. Res. 8, 1334 (1993).
5. W. Zhu, F. R. Sivazlian, B. R. Stoner, and J. T. Glass, J. Mater. Res., 10, 425 (1995).
6. K. Higaki, H. Nakahata, H. Kitabayashi, S. Fujii, K. Tanabe, Y. Seki, and S. Shikata, IEEE Transactions on Ultrasonics. Ferroelectrics. and Frequency Control 44, 1395 (1997).
7. K.-S. Ho, J. Lin, J. Chen, T. A. Rabson, and R. Higgins, Integrated Ferroelectrics. 11, 201 (1995).
8. R. S. Weis and T. K. Gaylord, Appl. Phvs. A. 37, 191 (1995).
9. H. Nakahata, A. Hachigo, K. Higaki, S. Fujii, S. Shikata, and N. Fujimori, JJEEE Transactions on Ultrasonics. Ferroelectrics. and Frequency Control 42, 362 (1995).
10. H. Fahmy and E. L. Adler, APPI. Phvs. Lett. 22, 495 (1973).
11. E. L. Adler, J. K. Slaboszewicz, G. W. Famell, and C. K. Jen, IEEE Transactions on Ultrasonics. Ferroelectrics. and Frequency Control 37, 215 (1990).
12. J.-T. Lee, N. Little, T. A. Rabson, and M. A. Robert, 1999 IEEE Ultrasonics Symposium Proceedings. 1, 269 (1999).
13. S. X. Wang, Q. X. Su, M. A. Robert, and T. A. Rabson, Mat. Res. Soc. Svmp. Proc. 541, 717 (1999).
14. S. X. Wang, T. A. Rabson, Q. X. Su, and M. A. Robert, Integrated Ferroelectrics. 25, 37 (1999).