Correlation of charge transport to local atomic strain in Si-rich silicon nitride thin films

Applied Physics Letters

Volumn 80, Issue 2, 2002, Pages 261-263

  Habermehl, S ^a   Carmignani, C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC STRAIN; BARRIER HEIGHTS; COMPOSITION RANGES; INDUCED STRAIN; MOLECULAR LEVELS; ORDERS OF MAGNITUDE; POOLE-FRENKEL; POOLE-FRENKEL EMISSION; SI-N BONDS; SILICON NITRIDE THIN FILMS;

SILICON; SILICON NITRIDE; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79956018651     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1433167     Document Type: Article

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