Microfluidic channels in porous silicon filled with a carbon absorbent for gas preconcentration

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 249-252

  Camara, E H M ^a   Pijolat, C ^a   Courbat, J ^b   Breuil, P ^a   Briand, D ^b   De Rooij, N F ^b  

^a CENTRE SPIN   (France)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Gas sensors; Micro reactor; Porous silicon; Pre concentrator

Indexed keywords

ABSORPTION; ACTUATORS; ADSORPTION; AIR POLLUTION; BENZENE; CARBON; CONCENTRATION (PROCESS); GAS ABSORPTION; GAS ADSORPTION; MICROSYSTEMS; NANOFLUIDICS; NONMETALS; POLLUTION DETECTION; SENSORS; SILICON; TRANSDUCERS;

A-CARBON; ATMOSPHERIC POLLUTIONS; CARBON NANOPOWDERS; EXPLOSIVES DETECTION; GAS SENSORS; INTERNATIONAL CONFERENCES; MICRO REACTORS; MICRO-FLUIDIC CHANNELS; MICRO-REACTOR; PRE-CONCENTRATION; PRE-CONCENTRATOR; SOLID-STATE SENSORS;

POROUS SILICON;

EID: 50049114137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300116     Document Type: Conference Paper

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