Dynamic extension - A new principle for a vacuum primary standard for UHV-range (10-6-10-10 Pa) calibration of hot cathode ionisation gauges

Vacuum

Volumn 85, Issue 11, 2011, Pages 1047-1051

  Peksa, L ^a   Gronych, T ^a   Jerab M ^a   Repa P ^a   Vicar M ^a   Krajicek Z ^b   Prazak D ^b   Stanek F ^b   Tesar J ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

Pressure ratio technique; Primary vacuum standard; UHV calibration

Indexed keywords

BASIC CONDITIONS; CALIBRATION CHAMBER; DYNAMIC EXTENSION; HOT CATHODES; IONISATION; LOW PRESSURES; PRESSURE RATIO; PRIMARY STANDARDS; PRIMARY VACUUM STANDARD; PUMPING RATE; SCALAR PRESSURE; TRANSFER STANDARD; UHV CALIBRATION; VACUUM STANDARDS;

CATHODES; GAGES; IONIZATION; STANDARDS; VACUUM;

CALIBRATION;

EID: 79955851754     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.03.019     Document Type: Article

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