Intrinsic top-down unmanufacturability

Nanotechnology

Volumn 22, Issue 24, 2011, Pages

  Kelly, M J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN RULES; INTRINSIC VARIABILITIES; MANUFACTURABILITY; REPRODUCIBILITIES; TOP-DOWN APPROACH; TOPDOWN;

FABRICATION;

EID: 79955849351     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/24/245303     Document Type: Article

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