Functionalized imidazolium wear-resistant ionic liquid ultrathin films for MEMS/NEMS applications

Surface and Interface Analysis

Volumn 43, Issue 6, 2011, Pages 1006-1014

  Mo, Yufei ^a   Huang, Fuchuan ^a   Zhao, Fei ^b  

^a GUANGXI UNIVERSITY   (China)

^b HENAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

adhesion; atomic force microscopy; ionic liquid; ultrathin film; wear

Indexed keywords

ADHESION BEHAVIORS; AMBIENT ENVIRONMENT; ANTI-WEAR; ATOMIC FORCE; CRITICAL STEPS; DIPCOATING METHODS; ELLIPSOMETRIC METHOD; FRICTION AND WEAR; FRICTION COEFFICIENTS; FRICTION FORCE MICROSCOPE; FUNCTIONALIZED; IMIDAZOLIUM; INTERFEROMETRIC MICROSCOPE; LOAD-BEARING CAPACITY; MEMS/NEMS; MICRO-SCALES; NANO SCALE; NEW MATERIAL; NON-CONTACT; SINGLE-CRYSTAL SILICON WAFERS; SLIDING FREQUENCY; SPHERICAL PROBES; THERMAL AND ELECTRICAL CONDUCTIVITY; TRIBOLOGICAL PERFORMANCE; TRIBOLOGICAL PROPERTIES; TRIBOTESTER; ULTRA-THIN; WEAR; WEAR TRACKS; WEAR-RESISTANT;

ADHESION; ATOMIC FORCE MICROSCOPY; DURABILITY; ELECTRIC CONDUCTIVITY; ELECTRIC LOAD MANAGEMENT; ELLIPSOMETRY; FILMS; FRICTION; IONIC LIQUIDS; IONS; MORPHOLOGY; PROBES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TRIBOLOGY;

ULTRATHIN FILMS;

EID: 79955602374     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3684     Document Type: Article

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