Stochastic modeling of the pull-in voltage in a MEMS beam structure

IEEE Transactions on Magnetics

Volumn 47, Issue 5, 2011, Pages 974-977

  Boloni, Francisc Attila ^a   Benabou, Abdelkader ^a   Tounzi, Abdelmounaïm ^a  

^a UNIV LILLE   (France)

Author keywords

Microelectromechanical system (MEMS); Monte Carlo; polynomial chaos expansion (PCE); pull in; stochastic

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; PRESTRESSED BEAMS AND GIRDERS; STOCHASTIC MODELS; STOCHASTIC SYSTEMS;

DETERMINISTIC MODELING; EULER-BERNOULLI BEAM EQUATION; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MONTE CARLO SAMPLING; POLYNOMIAL CHAOS EXPANSION (PCE); PULL-IN; STOCHASTIC; STOCHASTIC TECHNIQUES;

MONTE CARLO METHODS;

EID: 79955536719     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2010.2081355     Document Type: Article

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