A simple soft lithographic nanopatterning of gold on gallium arsenide via galvanic displacement

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 8, 2010, Pages 5020-5026

  Lim, Hyuneui ^a   Noh, Jung Hyun ^a   Choi, Dae Geun ^a   Kim, Wan Doo ^a   Maboudian, Roya ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b University of California   (United States)

Author keywords

Gallium arsenide; Galvanic displacement; Gold; Soft lithographic nanopatterning

Indexed keywords

ADHESION PROPERTIES; AQUEOUS SOLUTIONS; ELECTROLESS DEPOSITION; ELECTROLESS METALLIZATION; GAAS; GAAS SUBSTRATES; GAAS SURFACES; GALVANIC DISPLACEMENT; GOLD IONS; GOLD LAYER; GOLD SALTS; IMMERSION TIME; LITHOGRAPHIC PATTERNING; METALLIZATIONS; NANODOTS; NANOLINES; NANOPATTERNING; NANOSCALE PATTERNING; PLATING PARAMETERS; SOFT LITHOGRAPHIC NANOPATTERNING;

GALLIUM ARSENIDE; GOLD; GOLD COATINGS; GOLD DEPOSITS; LITHOGRAPHY; METALLIZING; NANOSTRUCTURED MATERIALS; PLASMA ETCHING; REDUCING AGENTS; SEMICONDUCTING GALLIUM; SUBSTRATES;

GALLIUM ALLOYS;

EID: 79955428950     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2390     Document Type: Conference Paper

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