Characterization of the surface properties of nanoparticles using moisture adsorption dynamic profiling

Chemical Engineering Science

Volumn 66, Issue 12, 2011, Pages 2545-2553

  Wang, Hao ^a   Yao, Junpin ^a,b   Shadman, Farhang ^a  

^a University of Arizona   (United States)

^b Matheson Tri Gas Inc   (United States)

Author keywords

Adsorption; Desorption; Dynamic simulation; Environmental impact; Mathematical modeling; Nanoparticle

Indexed keywords

ADSORPTION CAPACITIES; DYNAMIC INTERACTION; DYNAMIC SIMULATION; FUNDAMENTAL PROPERTIES; HEALTH EFFECTS; HEALTH IMPACT; IN-SITU FT-IR; MAJOR FACTORS; MATHEMATICAL MODELING; MODEL COMPOUND; MOISTURE ADSORPTION; MOLECULAR CONTAMINANTS; PROCESS SIMULATORS; RATE EXPRESSION; SAMPLE CELL; SEMICONDUCTOR MANUFACTURING; SIZE DEPENDENT; SURFACE COVERAGES; SURFACE INTERACTIONS;

ACTIVATION ENERGY; ADSORPTION; COMPUTER SIMULATION; DESORPTION; HAFNIUM COMPOUNDS; MOISTURE; NANOPARTICLES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON COMPOUNDS; SURFACE PROPERTIES;

ENVIRONMENTAL IMPACT;

EID: 79955020382     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2011.02.057     Document Type: Article

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