The spray-ILGAR® (ion layer gas reaction) method for the deposition of thin semiconductor layers: Process and applications for thin film solar cells

Solar Energy Materials and Solar Cells

Volumn 95, Issue 6, 2011, Pages 1518-1526

  Fischer, Christian Herbert ^a   Allsop, Nicholas A ^a,d   Gledhill, Sophie E ^a   Köhler, Tristan ^a   Krüger, Martin ^a   Sáez Araoz, Rodrigo ^a   Fu, Yanpeng ^a   Schwieger, Robert ^a   Richter, Johannes ^b   Wohlfart, Peter ^b   Bartsch, Peter ^c   Lichtenberg, Nils ^c   Lux Steiner, Martha C ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b Singulus Technologies AG   (Germany)

^c BEUTH UNIVERSITY OF APPLIED SCIENCES   (Germany)

^d Sulfurcell Solartechnik GmbH   (Germany)

Author keywords

Buffer layer; Chalcopyrite thin film solar cell; ILGAR; In line process; In2S3

Indexed keywords

AEROSOL-ASSISTED CHEMICAL VAPOUR DEPOSITIONS; BI-LAYER; BUFFER MATERIALS; CDS; CHALCOPYRITE SOLAR CELLS; CHALCOPYRITE THIN FILMS; CHEMICAL MECHANISM; CHEMICAL-BATH DEPOSITION; CONTROLLED DEPOSITION; CU(IN , GA)SE; CU(IN ,GA)(S ,SE)2; HEATED SUBSTRATES; HELMHOLTZ; ILGAR; IN-LINE; IN-PROCESS; IN2S3; ION LAYER GAS REACTION; LAYER THICKNESS; LINEAR PRODUCTION; MATERIAL PROPERTY; NANODOTS; NEBULISATION; PILOT PRODUCTION; PRECURSOR SOLUTIONS; PROCESS ACCELERATION; ROLL TO ROLL; RUNNING-IN; STEEL TAPE; THIN FILM SOLAR CELLS; THIN SEMICONDUCTOR; UPSCALING; VACUUM-FREE;

ATMOSPHERIC AEROSOLS; BUFFER LAYERS; CADMIUM COMPOUNDS; CADMIUM SULFIDE; CHEMICAL VAPOR DEPOSITION; CHLORINE; COPPER COMPOUNDS; DEPOSITION; EPITAXIAL LAYERS; ETHANOL; INDUSTRY; MASS SPECTROMETRY; NANOSTRUCTURED MATERIALS; OPTICAL WAVEGUIDES; PILOT PLANTS; SEMICONDUCTING SELENIUM COMPOUNDS; SOLAR CELLS; ZINC SULFIDE;

PROCESS CONTROL;

EID: 79955020043     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.12.019     Document Type: Article

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