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Volumn 67, Issue 1-4, 2001, Pages 113-120

ILGAR technology IV: ILGAR thin film technology extended to metal oxides

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING FILMS; SUBSTRATES; THIN FILM DEVICES; WATER; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

EID: 0038292900     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(00)00270-1     Document Type: Article
Times cited : (35)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.