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Volumn 67, Issue 1-4, 2001, Pages 113-120
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ILGAR technology IV: ILGAR thin film technology extended to metal oxides
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIA;
CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING FILMS;
SUBSTRATES;
THIN FILM DEVICES;
WATER;
X RAY DIFFRACTION ANALYSIS;
ZINC OXIDE;
ION LAYER GAS REACTIONS (ILGAR);
SOLAR CELLS;
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EID: 0038292900
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(00)00270-1 Document Type: Article |
Times cited : (35)
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References (17)
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