SCOPUS 정보 검색 플랫폼

Volumn 20, Issue 4, 2011, Pages 613-615

Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth

(9) Taylor, Andrew a Fendrych, František a Fekete, Ladislav a Vlček, Jan b Řezáčová, Vladimíra c Petrák, Václav c Krucký, Jaroslav c Nesládek, Miloš d Liehr, Michael e

a INSTITUTE OF PHYSICS (Czech Republic)

b INSTITUTE OF CHEMICAL TECHNOLOGY (Czech Republic)

c CZECH TECHNICAL UNIVERSITY IN PRAGUE (Czech Republic)

d HASSELT UNIVERSITY (Belgium)

e Leybold Vakuum Dresden GmbH (Germany)

Author keywords

High frequency; Microwave plasma enhanced CVD; Nanodiamond; OES; Raman

Indexed keywords

HIGH FREQUENCY; MICROWAVE PLASMA ENHANCED CVD; NANODIAMOND; OES; RAMAN;

ANTENNAS; CAVITY RESONATORS; DEPOSITION; DIAMONDS; EMISSION SPECTROSCOPY; FILM PREPARATION; MICROELECTRONICS; MICROWAVES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; RESONANCE; THIN FILMS;

DIAMOND FILMS;

EID: 79955006779 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2011.01.003 Document Type: Article

Times cited : (41)

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