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Volumn 43, Issue 37, 2010, Pages
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Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system
a
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Author keywords
[No Author keywords available]
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Indexed keywords
3-D SHAPE;
BASIC PROPERTIES;
DRESDENS;
GAS CHEMISTRY;
HIGH FREQUENCY HF;
HIGH-DENSITY;
LARGE-AREA SUBSTRATES;
LINEAR ANTENNAS;
LOW SUBSTRATE TEMPERATURE;
MICROWAVE CVD;
MW DISCHARGE;
NANO DIAMOND;
NANOCRYSTALLINE DIAMONDS;
NCD FILMS;
PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITIONS;
PULSE DISCHARGE;
SUBSTRATE MATERIAL;
ANTENNAS;
DIAMOND FILMS;
DIAMONDS;
ELECTRIC DISCHARGES;
EMISSION SPECTROSCOPY;
INDUSTRIAL APPLICATIONS;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA DENSITY;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMAS;
SUBSTRATES;
THIN FILMS;
THREE DIMENSIONAL;
FILM PREPARATION;
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EID: 78249269777
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/43/37/374018 Document Type: Article |
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Times cited : (61)
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References (8)
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