Fabrication of free standing LiNbO3 single crystal micro-platelets and their integration to Si-on-insulator platforms

Thin Solid Films

Volumn 519, Issue 13, 2011, Pages 4271-4276

  Lee, Yoo Seung ^a   Lee, Sang Shin ^a,b   Lee, Wan Gyu ^c   Steier, William H ^a  

^a University of Southern California ^*  (United States)

^b Kwangwoon University   (South Korea)

^c National Nano Fab Center (NNFC)   (South Korea)

Author keywords

Crystal ion slicing; Electro optic material; Ion implantation; Lithium niobate' thin films

Indexed keywords

ANNEALING CONDITION; ATOMIC FORCE MICROSCOPES; CRYSTAL ION SLICING; DIRECT BONDING; ELECTRO-OPTIC MATERIAL; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FILM QUALITY; HIGH TEMPERATURE; HYBRID STRUCTURE; LITHIUM NIOBATE' THIN FILMS; MATERIAL PROPERTY; SI-ON-INSULATOR; SI-WAVEGUIDE; SOI SUBSTRATES; THERMAL MISMATCH; THERMAL TREATMENT; ULTRA-THIN; X-RAY DIFFRACTION MEASUREMENTS;

CRYSTAL STRUCTURE; FIELD EMISSION; ION IMPLANTATION; LITHIUM; NIOBIUM COMPOUNDS; PLATELETS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON COMPOUNDS; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE STRUCTURE; THIN FILMS; X RAY DIFFRACTION;

SILICON WAFERS;

EID: 79954449166     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.411     Document Type: Article

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