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Volumn 11, Issue 9, 2011, Pages 1694-1697

Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide

(2) Diebold, Roger M a,b Clarke, David R a

a HARVARD UNIVERSITY (United States)

b University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMETICONE; GLUTARIMIDE DERIVATIVE; POLYDIMETHYLGLUTARIMIDE; UNCLASSIFIED DRUG;

ANALYTIC METHOD; ARTICLE; DIFFRACTION; LITHOGRAPHY; MICROFLUIDIC ANALYSIS; MICROFLUIDICS; NANOFABRICATION; PRIORITY JOURNAL; STATIC ELECTRICITY;

EID: 79954434521 PISSN: 14730197 EISSN: 14730189 Source Type: Journal
DOI: 10.1039/c0lc00732c Document Type: Article

Times cited : (11)

References (28)

1
- 79954435012
- A. D. Stroock G. M. Whitesides Electrophoresis 2002 23 3461 3473
- (2002) Electrophoresis , vol.23 , pp. 3461-3473
- Stroock, A.D.¹ Whitesides, G.M.²

2
- 36549078581
- C. Liu Adv. Mater. 2007 19 3783 3790
- (2007) Adv. Mater. , vol.19 , pp. 3783-3790
- Liu, C.¹

3
- 0033343526
- Sylgard 184, 10:1 base:cure agent, 310 ppm per°C.
- J. Kim M. K. Chaudhury M. J. Owen IEEE Trans. Dielectr. Electr. Insul. 1999 6 695 702
- (1999) IEEE Trans. Dielectr. Electr. Insul. , vol.6 , pp. 695-702
- Kim, J.¹ Chaudhury, M.K.² Owen, M.J.³

4
- 0035728783
- CTE SU-8, 52 ppm per°C.
- T. Buma M. Spisar M. O'Donnell Proc. - IEEE Ultrason. Symp. 2001 2 1143 1146
- (2001) Proc. - IEEE Ultrason. Symp. , vol.2 , pp. 1143-1146
- Buma, T.¹ Spisar, M.² O'Donnell, M.³

5
- 34249895267
- L. Sainiemi S. Franssila J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. 2007 25 801 807
- (2007) J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. , vol.25 , pp. 801-807
- Sainiemi, L.¹ Franssila, S.²

6
- 40449089502
- K. W. Meacham R. J. Giuly L. Guo S. Hochman S. P. DeWeerth Biomed. Microdevices 2007 10 259 269
- (2007) Biomed. Microdevices , vol.10 , pp. 259-269
- Meacham, K.W.¹ Giuly, R.J.² Guo, L.³ Hochman, S.⁴ Deweerth, S.P.⁵

7
- 0032516193
- N. Bowden S. Brittain A. G. Evans J. W. Hutchinson G. M. Whitesides Nature 1998 393 146 149
- (1998) Nature , vol.393 , pp. 146-149
- Bowden, N.¹ Brittain, S.² Evans, A.G.³ Hutchinson, J.W.⁴ Whitesides, G.M.⁵

8
- 33745437437
- R. Pal K. E. Sung M. A. Burns Langmuir 2006 22 5392 5397
- (2006) Langmuir , vol.22 , pp. 5392-5397
- Pal, R.¹ Sung, K.E.² Burns, M.A.³

9
- 27944464125
- G. Y. Yang V. J. Bailey Y. H. Wen G. Lin W. C. Tang J. H. Keyak Proc. IEEE Sensors 2004 3 1355 1358
- (2004) Proc. IEEE Sensors , vol.3 , pp. 1355-1358
- Yang, G.Y.¹ Bailey, V.J.² Wen, Y.H.³ Lin, G.⁴ Tang, W.C.⁵ Keyak, J.H.⁶

10
- 0000678066
- N. Bowden W. T. Huck K. E. Paul G. M. Whitesides Appl. Phys. Lett. 1999 75 2557 2559
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2557-2559
- Bowden, N.¹ Huck, W.T.² Paul, K.E.³ Whitesides, G.M.⁴

11
- 47049098848
- S. Y. Xiao L. F. Che X. X. Li Y. L. Wang Microelectron. Eng. 2007 85 452 457
- (2007) Microelectron. Eng. , vol.85 , pp. 452-457
- Xiao, S.Y.¹ Che, L.F.² Li, X.X.³ Wang, Y.L.⁴

12
- 38749153556
- S. P. Desai B. M. Taff J. Voldman Langmuir 2008 24 575 581
- (2008) Langmuir , vol.24 , pp. 575-581
- Desai, S.P.¹ Taff, B.M.² Voldman, J.³

13
- 67849094323
- P. Jothimuthu A. Carroll A. A. Bhagat G. Lin J. E. Mark I. Papautsky J. Micromech. Microeng. 2009 19 045024
- (2009) J. Micromech. Microeng. , vol.19 , pp. 045024
- Jothimuthu, P.¹ Carroll, A.² Bhagat, A.A.³ Lin, G.⁴ Mark, J.E.⁵ Papautsky, I.⁶

14
- 0031632795
- Y. Xia G. M. Whitesides Annu. Rev. Mater. Sci. 1998 28 153 184
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 153-184
- Xia, Y.¹ Whitesides, G.M.²

15
- 33745826263
- P. Dubois S. Rosset S. Koster J. Stauffer S. Mikhailov M. Dadras N. F. Rooij H. Shea Sens. Actuators, A 2006 130 147 154
- (2006) Sens. Actuators, A , vol.130 , pp. 147-154
- Dubois, P.¹ Rosset, S.² Koster, S.³ Stauffer, J.⁴ Mikhailov, S.⁵ Dadras, M.⁶ Rooij, N.F.⁷ Shea, H.⁸

16
- 42549125999
- M. A. Eddings M. A. Johnson B. K. Gale J. Micromech. Microeng. 2008 18 067001
- (2008) J. Micromech. Microeng. , vol.18 , pp. 067001
- Eddings, M.A.¹ Johnson, M.A.² Gale, B.K.³

17
- 85022113489
- US Pat., 4814258
- G. Tam, US Pat., 4814258, 1987
- (1987)
- Tam, G.¹

18
- 44149084033
- B. Cui T. Veres Microelectron. Eng. 2008 85 810 813
- (2008) Microelectron. Eng. , vol.85 , pp. 810-813
- Cui, B.¹ Veres, T.²

19
- 2342609609
- CTE PMGI: 56 ± 6 ppm per°C.
- P. Mouroulis F. T. Hartley D. W. Wilson V. E. White A. Shori S. Nguyen M. Zhang M. Feldman Opt. Express 2003 11 270 281
- (2003) Opt. Express , vol.11 , pp. 270-281
- Mouroulis, P.¹ Hartley, F.T.² Wilson, D.W.³ White, V.E.⁴ Shori, A.⁵ Nguyen, S.⁶ Zhang, M.⁷ Feldman, M.⁸

20
- 42549158960
- See footnote 58 regarding benzene, a good swelling agent for PDMS:
- I. G. Foulds R. W. Johnstone S. H. Tsang M. Hamidi M. Parameswaran J. Micromech. Microeng. 2008 18 045026
- (2008) J. Micromech. Microeng. , vol.18 , pp. 045026
- Foulds, I.G.¹ Johnstone, R.W.² Tsang, S.H.³ Hamidi, M.⁴ Parameswaran, M.⁵

21
- 0344737989
- J. N. Lee C. Park G. M. Whitesides Anal. Chem. 2003 75 6544 6554
- (2003) Anal. Chem. , vol.75 , pp. 6544-6554
- Lee, J.N.¹ Park, C.² Whitesides, G.M.³

22
- 0034615958
- M. A. Unger H. P. Chou T. Thorsen A. Scherer S. R. Quake Science 2000 288 113 116
- (2000) Science , vol.288 , pp. 113-116
- Unger, M.A.¹ Chou, H.P.² Thorsen, T.³ Scherer, A.⁴ Quake, S.R.⁵

23
- 0022695194
- B. A. Johnson J. Kreuter G. Zograti Colloids Surf. 1986 17 325 342
- (1986) Colloids Surf. , vol.17 , pp. 325-342
- Johnson, B.A.¹ Kreuter, J.² Zograti, G.³

24
- 85022104363
- US Pat., 4524121
- R. D. Gleim and M. D. de Grandpre. US Pat., 4524121, 1985
- (1985)
- Gleim, R.D.¹ De Grandpre, M.D.²

25
- 0025447224
- L. L. Spangler J. M. Torkelson J. S. Royal Polym. Eng. Sci. 1990 30 644 653
- (1990) Polym. Eng. Sci. , vol.30 , pp. 644-653
- Spangler, L.L.¹ Torkelson, J.M.² Royal, J.S.³

26
- 0007243089
- R. Yerushalmi-Rozen J. Klein L. J. Fetters Science 1994 263 793 795
- (1994) Science , vol.263 , pp. 793-795
- Yerushalmi-Rozen, R.¹ Klein, J.² Fetters, L.J.³

27
- 0031209139
- P. C. Tsiartas L. W. Flanagin C. L. Henderson W. D. Hinsberg I. C. Sanchez R. T. Bonnecaze C. G. Willson Macromolecules 1997 30 4656 4664
- (1997) Macromolecules , vol.30 , pp. 4656-4664
- Tsiartas, P.C.¹ Flanagin, L.W.² Henderson, C.L.³ Hinsberg, W.D.⁴ Sanchez, I.C.⁵ Bonnecaze, R.T.⁶ Willson, C.G.⁷

28
- 0030646206
- J. M. Shaw J. D. Gelorme N. C. LaBianca W. E. Conley S. J. Holmes IBM J. Res. Dev. 1997 41 81 94
- (1997) IBM J. Res. Dev. , vol.41 , pp. 81-94
- Shaw, J.M.¹ Gelorme, J.D.² Labianca, N.C.³ Conley, W.E.⁴ Holmes, S.J.⁵

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