MEMS integrated narrow band infrared emitter and detector for infrared gas sensor

Journal of Physics: Conference Series

Volumn 276, Issue 1, 2011, Pages

  Lai, J J ^a   Liang, H F ^a   Peng, Z L ^a   Yi, X ^a   Zhai, X F ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DETECTORS; SUBSTRATES;

DETECTOR ELEMENTS; INFRARED EMITTERS; INFRARED GAS SENSORS; MEMS INTEGRATED; MEMS TECHNOLOGY; MICRO-FABRICATION TECHNOLOGY; SILICON SUBSTRATES; SPECTRUM DETECTION;

INFRARED DEVICES;

EID: 79953889824     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/276/1/012129     Document Type: Conference Paper

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