Microfabricated pressure sensing particles with integrated retroreflectors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1158-1161

  Chalasani, S ^a,b   Xie, Y ^a   Mastrangelo, C H ^a  

^a UNIVERSITY OF UTAH   (United States)

^b QUALCOMM INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY FORM; ELASTIC SHELLS; MICROFABRICATED; MICROFLUIDIC ENVIRONMENT; PARTICLE COLOR; PRESSURE SENSING; PRESSURE SENSITIVITIES; RETRO REFLECTOR; RETRO-REFLECTORS; SEMI-TRANSPARENT; SPECTRAL SHIFT; VACUUM CAVITY; WHITE LIGHT;

COLOR; MECHANICAL ENGINEERING; MECHANICS; MICROFABRICATION; PRESSURE SENSORS; REACTIVE ION ETCHING;

MEMS;

EID: 79953793611     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734636     Document Type: Conference Paper

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