Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1189-1192

  Kliche, K ^a   Billat, S ^a   Hedrich, F ^a   Ziegler, C ^a   Zengerle, R ^a  

^a Institute für Mikro und Informationstechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GAS ANALYSIS; GAS TEMPERATURE; PHYSIOLOGICAL RANGE; SPECIFIC HEAT CAPACITY; SQUARE WAVE SIGNALS; TRANSIENT CHANGES; TRANSIENT HEAT;

CALORIMETRY; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING; SPECIFIC HEAT; THERMAL CONDUCTIVITY; THERMAL DIFFUSION; THERMAL DIFFUSIVITY;

THERMAL CONDUCTIVITY OF GASES;

EID: 79953791941     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734644     Document Type: Conference Paper

References (8)

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