Thermal flow sensors for MEMS spirometric devices

Sensors and Actuators, A: Physical

Volumn 162, Issue 2, 2010, Pages 373-378

  Hedrich, F ^a   Kliche, K ^a   Storz, M ^a   Billat, S ^a   Ashauer, M ^a   Zengerle, R ^a  

^a Institute for Micromachining and Information Technology   (Germany)

Author keywords

Bypass solution; Fast response time; Flow sensor; High flow rates; Spirometric devices

Indexed keywords

BYPASS SOLUTION; FAST RESPONSE TIME; FLOW-SENSORS; HIGH-FLOW RATE; SPIROMETRIC DEVICES;

CARDIOVASCULAR SYSTEM;

SENSORS;

EID: 77957142829     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.019     Document Type: Conference Paper

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