Parametric amplification/damping in MEMS gyroscopes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 617-620

  Sharma, Mrigank ^a   Sarraf, Elie H ^a   Cretu, Edmond ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR RATE; DETECTABLE SIGNAL; DRIVING FORCES; INERTIAL SENSOR; INPUT NOISE; MAXIMUM GAIN; MEMS GYROSCOPE; MEMS-STRUCTURE; NOISE LEVELS; PARAMETRIC AMPLIFICATION; PARAMETRIC GAIN; PARAMETRIC MODULATION; PARAMETRIC-COUPLING; PHASE DIFFERENCE; QUADRATURE ERROR; READ-OUT CIRCUIT; RESONANT STRUCTURES; SENSING CIRCUITS; SIGNAL AMPLIFICATIONS; SIGNAL TO NOISE; SPECTRAL SELECTIVITY; UNDESIRED SIGNAL COMPONENTS;

AMPLIFICATION; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; ERRORS; GYROSCOPES; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING; SIGNAL PROCESSING; SIGNAL TO NOISE RATIO; THERMAL NOISE;

MEMS;

EID: 79953775610     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734500     Document Type: Conference Paper

References (7)

1. D. Rugar and P. Grutter, "Mechanical Parametric Amplification and Thermo Mechanical Noise Squeezing", Phys. Rev. Lett., vol67, pp. 699-702, 1991.
2. M.J. Thompson, D.A. Horsley, "Parametrically Amplified MEMS Magnetometer", in Proc. Transducers '09, Denver, Co, USA, June 21-25, 2009, pp-1194-97.
3. Honeywell, "MEMS Gyroscope with Parametric Gain" US Patent 06715353, 2002.
4. L. Yongsik, "A study of parametric excitation applied to a MEMS tuning fork gyroscope", PhD dissertation, University of Missouri Columbia, 2007.
5. B.J, Gallacher, J S Burdess and K M Harish, "A Control Scheme for A MEMS Electrostatic Resonant Gyroscope excited using Combined Parametric Excitation and Harmonic Forcing", J. Micromech. Microeng., vol. 16, pp. 320-331, 2006. (Pubitemid 43146237)
6. A. Laura Oropeza-Ramos, Christopher B. Burgner, and Kimberly L. Turner, "Robust Micro-rate Sensor Actuated by Parametric Resonance", Sens. Actuators A:Phys., vol.152, pp. 80-87, 2009.
7. T. Ono, H. Wakamatsu, M. Esahi, "Parametrically Amplified Thermal Resonant Sensor with Pseudo- Cooling Effect", J. Micromech. Microeng., vol.15, pp. 2282-2288, 2005. (Pubitemid 41677095)