Reduced viscous damping in high frequency Piezoelectric Resonant Nanochannels for sensing in fluids

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 960-963

  Zuniga, C ^a   Rinaldi, M ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH FREQUENCY; LIQUID ENVIRONMENT; NANO CHANNELS; NOVEL PROCESS; QUALITY FACTORS; RESONANT DEVICE; RESONANT SENSORS; VISCOUS DAMPING;

ALUMINUM NITRIDE; DAMPING; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; GLYCEROL; LIQUIDS; MECHANICAL ENGINEERING; NITRIDES; PIEZOELECTRICITY; REACTIVE ION ETCHING;

MEMS;

EID: 79953775596     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734586     Document Type: Conference Paper

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