Low power thermal tuning of SOI-CMOS photonic structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7944, Issue , 2011, Pages

  Shubin, Ivan ^a   Zheng, Xuezhe ^a   Li, Guoliang ^a   Thacker, Hiren ^a   Yao, Jin ^a   Guenin, Bruce ^a   Pinguet, Thierry ^b   Mekis, Attila ^a   Krishnamoorthy, A V ^a   Cunningham, J E ^a  

^a Sun Labs   (United States)

^b CISCO SYSTEMS   (United States)

Author keywords

CMOS photonics; Filters; Mux demux; Silicon photonics; Thermal tuning

Indexed keywords

CMOS PHOTONICS; FILTERS; MUX/DEMUX; SILICON PHOTONICS; THERMAL TUNING;

CMOS INTEGRATED CIRCUITS; INTEGRATION; PHOTONIC DEVICES;

PHOTONICS;

EID: 79953688563     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.876428     Document Type: Conference Paper

References (20)

1. Krishnamoorthy, A. V., Ho, R., Zheng, X., Schwetman, H., Lexau, J., Koka, P., Li, G., Shubin, I. and Cunningham, J. E., "Computer systems based on silicon photonic interconnects", Proc. IEEE 97 (7), 1337-1361 (2009).
2. Narasimha, A., Analui, B., Liang, L., Sleboda, T., Abdalla, S., Balmater, E., Gloeckner, S., Guckenberger, D., Harrison, M., Koumans, R., Kucharski, D., Mekis, A., Mirsaidi, S., Song, D. and Pinguet T., "A Fully Integrated 4 10-Gb/s DWDM Optoelectronic Transceiver Implemented in a Standard 0.13 μm CMOS SOI Technology", IEEE J. of Solid-state Circuits, 42, (12), 2736-2744 (2007).
3. Li, G., Zheng, X., Lexau, J., Luo, Y., Thacker, H., Dong, P., Liao, S., Feng, D., Zheng, D., Shafiiha, R., Asghari, M., Yao, J., Shi, J., Amberg, P., Pinckney, N., Raj, K., Ho, R., Cunningham, J. and Krishnamoorthy, A. V., "Ultralow-Power High-Performance Si Photonic Transmitter," in Optical Fiber Communication Conference, paper OMI2 (2010).
4. pp, ultralow-energy, compact, high-speed silicon electro-optic modulator," Opt. Express 17, 22484-22490 (2010).
5. Zheng, X., Liu, F., Patil, D., Thacker, H., Luo, Y., Pinguet, T., Mekis, A., Yao, J., Li, G., Shi, J., Raj, K., Lexau, J., Alon, E., Ho, R., Cunningham, J. E. and Krishnamoorthy, A. V., "A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems," Opt. Express, 18, 204-211 (2010).
6. Thacker, H. D., Luo, Y., Shi, J., Shubin, I., Lexau, J., Zheng, X., Li, G., Yao, J., Costa, J., Pinguet, T., Mekis, A., Dong, P., Liao, S., Feng, D., Asghari, M., Ho, R., Raj, K., Mitchell, J.G., Krishnamoorthy, A.V., Cunningham, J.E., "Flip-Chip Integrated Silicon Photonic Bridge Chips for Sub-Picojoule per Bit Optical Links," IEEE Electron. Compon. Technol. Conf., 240-246 (2010).
7. Fan, M. H., Gerung, H., Yelehanka, P. R., Cheng, A., Zhou, M. S., Chi, C., Tan, C. H., Xie, J., "Critical dimension control optimization methodology on shallow trench isolation substrate for sub-0.25 μm technology gate patterning" Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 19 (2), 456-460 (2001). (Pubitemid 32435269)
8. Kim, H. and Hwang, H., "Effect of statistical process variation of MOSFET on hot carrier lifetime", Solid-State Electronics, 43 (5), 989-991 (1999).
9. th European Conference on Integrated Optics, (2008).
10. Krishnamoorthy, A. V., Zheng, X., Li, G., Yao, J., Pinguet, T., Thacker, H., Shubin, I., Luo, Y., Raj, K., and Cunningham, J. E., "Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices," Submitted for publication to Optics Express, Feb. (2010).
11. Zortman, W. A., Trotter, D. C., and Watts, M. R., "Silicon photonics manufacturing," Opt. Express, 18, 23598-23607 (2010).
12. Shubin, I., Zheng, X., Thacker, H., Yao, J., Costa, J., Luo, Y., Li, G., Krishnamoorthy, A. V., Cunningham, J.E., Pinguet, T., Mekis, A., "Thermally tunable SOI CMOS photonics circuits," Proc. SPIE 7607, 76070C (2010).
13. Zheng, X., Shubin, I., Li, G., Pinguet, T., Mekis, A., Yao, J., Thacker, H., Luo, H., Costa, J., Raj, K., Cunningham, J. E., and Krishnamoorthy, A. V., "A tunable 1×4 silicon CMOS photonic wavelength multiplexer/ demultiplexer for dense optical interconnects," Opt. Express 18, 5151-5160 (2010).
14. Khan, M. H., Shen, H., Xuan, Y., Xiao, S., and Qi, M., "Eight-Channel Microring Resonator Array with Accurately Controlled Channel Spacing", CLEO/QELS (2008).
15. Tea, N. H., Milanovic, V., Zincke, C., Suehle, J. S., Gaitan, M., Zaghloul, M. E., and Geist, J., "Hybrid Postprocessing Etching for CMOS-Compatible MEMS," J. Microelectromech. Syst. 6(4), 363-372 (1997). (Pubitemid 127627434)
16. Dong, P., Qian, W., Liang, H., Shafiiha, R., Feng, D., Li, G., Cunningham, J. E., Krishnamoorthy, A. V., and Asghari, M., "Thermally tunable silicon racetrack resonators with ultralow tuning power," Opt. Express 18, 20298-20304 (2010).
17. Gan, F., Barwicz, T., Popovic, M.A., Dahlem, M.S., Holzwarth, C.W., Rakich, P.T., Smith, H.I., Ippen, E.P., Kartner, F.X., "Maximizing the Thermo-Optic Tuning Range of Silicon Photonic Structures", Photonics in Switching, 67-68 (2007).
18. Watts, M. R., Zortman, W. A., Trotter, D. C., Nielson, G. N., Luck, D. L., and Young, R. W., "Adiabatic resonant microrings (ARMs) with directly integrated thermal microphotonics", 2009 Conference on Lasers and Electro-Optics CLEO/QELS, CPDB10 (2009).
19. Cunningham, J. E., Shubin, I., Zheng, X., Pinguet, T., Mekis, A., and Krishnamoorthy, A. V., "Highly-efficient thermally-tuned resonant filters," Opt. Express, 18 (18), 19055-19063 (2010).
20. http://www.brewerscience.com/products/protek/wet-etch-protective-coating/