An improved focus control mirror using SU-8 wafer bonding process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7930, Issue , 2011, Pages

  Moghimi, Mohammad J ^a   Lutzenberger, B Jeffery ^b   Oliver, Kyle ^a   Gates, Steven ^a   Xue, Xiaohu ^a   Kaylor, Brant ^b   Dickensheets, Dvid L ^a  

^a MONTANA STATE UNIVERSITY   (United States)

^b Bridger Photonics Inc   (United States)

Author keywords

focus control; MEMS deformable mirror; SU 8; wafer bonding

Indexed keywords

ADHESIVE LAYERS; FOCUS CONTROL; LOW COST FABRICATION; MEMS DEFORMABLE MIRROR; NEW PROCESS; RESIDUAL ABERRATION; SPHERICAL ABERRATIONS; SU-8; WAFER BONDING PROCESS;

DEFORMATION; LASER PULSES; LENSES; MIRRORS; MOEMS; OPTICAL PROPERTIES; OPTICAL SYSTEMS;

WAFER BONDING;

EID: 79953667964     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.876672     Document Type: Conference Paper

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