Direct fabrication of integrated 3D epitaxial functional transition metal oxide nanostructures using extremely small hollow nanopillar nano-imprint metal masks

Nanotechnology

Volumn 22, Issue 18, 2011, Pages

  Cha, Nam Goo ^a   Kanki, Teruo ^a   Tanaka, Hidekazu ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PROCESS; DEPOSITION TEMPERATURES; FERROMAGNETIC OXIDES; FUNCTIONAL OXIDES; FUNCTIONAL TRANSITIONS; METAL MASKS; NANO-IMPRINT; NANOFABRICATION TECHNIQUES; NANOMASKS; NANOPILLAR; SAPPHIRE SUBSTRATES; WINDOW SIZE;

EPITAXIAL GROWTH; MANGANESE; MOLYBDENUM; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES; PULSED LASER DEPOSITION; TRANSITION METAL COMPOUNDS;

MOLYBDENUM OXIDE;

EID: 79953287193     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/18/185306     Document Type: Article

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