Synthesis of cobalt/diamond-like carbon thin films by biased target ion beam deposition

Diamond and Related Materials

Volumn 20, Issue 4, 2011, Pages 538-541

  Tang, Y ^a   Li, Y S ^a   Zhang, C Z ^a   Wang, J ^b   Yang, Q ^a   Hirose, A ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b CANADIAN LIGHT SOURCE INC   (Canada)

Author keywords

Biased Target Ion Beam Deposition NEXAFS; Co DLC; Thin Films

Indexed keywords

AS-DEPOSITED FILMS; BINDING STATE; CARBON SOURCE; CARBON THIN FILMS; CHEMICAL COMPOSITIONS; CO/DLC; COMPOSITE THIN FILMS; HIGH QUALITY; ION BEAM DEPOSITION; MASS CONCENTRATION; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE STUDIES;

ABSORPTION SPECTROSCOPY; BEAM PLASMA INTERACTIONS; CARBON FILMS; CHEMICAL MODIFICATION; COBALT; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; IONS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; THIN FILMS; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITE FILMS;

EID: 79952701848     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.02.014     Document Type: Article

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