Near infra-red Mueller matrix imaging system and application to retardance imaging of strain

Thin Solid Films

Volumn 519, Issue 9, 2011, Pages 2737-2741

  Aas, Lars Martin Sandvik ^a   Ellingsen, Pål Gunnar ^a   Kildemo, Morten ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

Ellipsometry; Imaging; Mueller matrix; Polarimetry; Silicon wafer; Strain imaging

Indexed keywords

IMAGING; IMAGING ELLIPSOMETER; MUELLER MATRIX; MULTI-CRYSTALLINE SILICON; NEAR INFRARED; POLARIMETRY; RETARDANCE; STRAIN IMAGING; TRANSPARENT SOLIDS;

ELLIPSOMETRY; POLARIMETERS; SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 79952624198     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.12.093     Document Type: Article

References (26)

1. Lars Martin Sandvik Aas, Paal Gunnar Ellingsen, Morten Kildemo, and Mikael Lindgren J. Mod. Opt. 57 17 2010 1603
2. Blandine Laude-Boulesteix, Antonello De Martino, Bernard Drévillon, and Laurent Schwartz Appl. Opt. 43 14 May 2004 2824
3. J.M. Bueno, and P. Artal Opt. Lett. 24 1 1999 64
4. J.R. Chung, J.S. Baba, A.H. DeLaughter, and G.L. Cote Proceedings of SPIE vol. 4613 2002 111
5. A.M. Baldwin, J.R. Chung, J.S. Baba, C.H. Spiegelman, and M.S. 25th Proceedings of IEEE 2003 1027
6. D. Lara-Saucedo, and C. Dainty Investig. Ophtalmol. Vis. Sci. 44 5 2003 3627
7. Michael Richert, Xavier Orlik, and Antonello De Martino Opt. Express 17 16 August 2009 14199
8. Nirmalya Ghosh, Michael F.G. Wood, and I. Alex Vitkin J. Biomed. Opt. 13 4 2010 044036
9. M.K. Swami, S. Manhas, P. Buddhiwant, N. Ghosh, A. Uppal, and P.K. Gupta Opt. Express 14 2006 9324
10. S. Manhas, M.K. Swami, P. Buddhiwant, N. Ghosh, P.K. Gupta, and K. Singh Opt. Express 14 2006 190
11. Nirmalya Ghosh, Michael F.G. Wood, Shu-hong Li, Richard D. Weisel, Brian C. Wilson, Ren-Ke Li, and I. Alex Vitkin J. Biophotonics 2 3 March 2009 145
12. S.Y. Lu, and R.A. Chipman J. Opt. Soc. Am. A 13 5 1996 1106
13. Razvigor Ossikovski J. Opt. Soc. Am. A Opt. Image Sci. Vis. 26 5 May 2009 1109
14. R. Ossikovski, A. De Martino, and S. Guyot Opt. Lett. 32 6 2007 689
15. R. Ossikovski, M. Anastasiadou, S.B. Hatit, E. Garcia-Caurel, and A. De Martino Phys. Status Solidi (A) 205 4 2008 720
16. E. Compain, S. Poirier, and B. Drevillon Appl. Opt. 38 16 June 1999 3490
17. E. Garcia-Caurel Thin Solid Films 455-456 2004 120
18. A.M. Gandorfer Opt. Eng. 38 8 1999 1402
19. T.S. Narasimhamurty Photoelastic and electro-optic properties of crystals 1981 Plenum Press New York
20. D.F. Nelson, and M. Lax Phys. Rev. B 3 8 1971 2778
21. J. Ladstein, F. Stabo-Eeg, E. Garcia-Caurel, and M. Kildemo Phys. Status Solidi (c) 5 5 May 2008 1097
22. J.M. Bueno J. Opt. A: Pure Appl. Opt. 2 3 2000 216
23. F. Stabo-Eeg, M. Kildemo, I.S. Nerbø, and M. Lindgren Opt. Eng. 47 2008 073604
24. J.S. Tyo Opt. Lett. 25 16 2000 1198
25. S.R. Cloude Proc Soc Photo Opt Instrum Eng vol. 1166 1989 177
26. Don Orr Brush Buckling of bars, plates and shells 1975 McGraw-Hill