Well-conditioned multiple laser Mueller matrix ellipsometer

Optical Engineering

Volumn 47, Issue 7, 2008, Pages

  Stabo Eeg, Frantz ^a   Kildemo, Morten ^a   Nerbo, Ingar Stian ^a   Lindgren, Mikael ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

laser applications; liquid crystals; metrology; Mueller matrices; optical activity; polarimetry; prisms

Indexed keywords

CONDITION NUMBERS; D-GLUCOSE; ELLIPSOMETERS; EXPERIMENTAL ERRORS; HIGH QUALITY; LIQUID CRYSTAL SPATIAL LIGHT MODULATORS; MUELLER MATRIX; MULTIPLE LASERS; NATIVE OXIDES; OPTICAL ACTIVITY; OPTICAL COMPONENTS; OPTICAL ROTATORY POWER; PERFORMANCE TESTS; REFLECTION AND TRANSMISSION; SYSTEM MATRICES; WIDE SPECTRAL RANGE;

ELLIPSOMETRY; GLUCOSE; LASER APPLICATIONS; LIGHT MODULATION; LIGHT MODULATORS; LIGHT SOURCES; LIQUID CRYSTALS; MEASUREMENTS; NUMBER THEORY; OPTICAL CONSTANTS; OPTICAL SYSTEMS; POLARIMETERS; PRISMS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

TRANSFER MATRIX METHOD;

EID: 81355133533     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2957047     Document Type: Article

References (24)

1. R. M. A., Azzam, " Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal, ", Opt. Lett., 2, 148-150 (1978). opl OPLEDP 0146-9592
2. P., Hauge, " Mueller matrix ellipsometry with imperfect compensators, ", J. Opt. Soc. Am., 68, 1519-1528 (1978). jox JOSAAH 0030-3941
3. D. H., Goldstein, " Mueller matrix dual-rotating retarder polarimeter, ", Appl. Opt., 31, 6676-6683 (1992). apo APOPAI 0003-6935
4. R. C., Thompson, J. R., Bottiger, and E. S., Fry, " Measurement of polarized light interactions via the Mueller matrix, ", Appl. Opt., 19, 1323-1332 (1980). apo APOPAI 0003-6935
5. A., de Martino, Y. K., Kim, E., Garcia-Caurel, B., Laude, and B., Drévillon, " Optimized Mueller polarimeter with liquid crystals, ", Opt. Lett., 28, 616-618 (2003). opl OPLEDP 0146-9592 10.1364/OL.28.000616
6. J., Ladstein, M., Kildemo, G. K., Svendsen, I. S., Nerbo, and F., Stabo-Eeg, " Characterisation of liquid crystals for broadband optimal design of Mueller matrix ellipsometers, ", Proc. SPIE, 6587, 65870D (2007). spi PSISDG 0277-786X
7. D. S., Sabatke, M. R., Descour, E. L., Dereniak, W. C., Sweatt, S. A., Kemme, and G. S., Phipps, " Optimization of retardance for a complete Stokes polarimeter, ", Opt. Lett., 25, 802-804 (2000). opl OPLEDP 0146-9592 10.1364/OL.25.000802
8. J. S., Tyo, " Noise equalization in Stokes parameter images obtained by use of variable-retardance polarimeters, ", Opt. Lett., 25, 1198-1200 (2000). opl OPLEDP 0146-9592 10.1364/OL.25.001198
9. 2, and fused silica, ", J. Mod. Opt. (to be published).
10. E., Compain, S., Poirier, and B., Drevillon, " General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometers, ", Appl. Opt., 38, 3490-3502 (1999). apo APOPAI 0003-6935
11. L., Sun and S., Edlou, " Low-birefringence lens design for polarization sensitive optical systems, ", Proc. SPIE, 6289, 62890H (2006). spi PSISDG 0277-786X
12. J. S., Tyo, " Design of optimal polarimeters: maximization of signal-to-noise ratio and minimization of systematic error, ", Appl. Opt., 41, 619-630 (2002). apo APOPAI 0003-6935 10.1364/AO.41.000619
13. S. R., Cloude, " Conditions for physical realizability of matrix operators in polarimetry, ", Proc. SPIE, 1166, 177-185 (1990). spi PSISDG 0277-786X
14. A. B., Kostinski, C. R., Givens, and J. M., Kwiatkowski, " Constraints on Mueller matrices of polarization optics, ", Appl. Opt., 32, 1646-1651 (1993). apo APOPAI 0003-6935
15. M., Bass, E. W. V., Stryland, D. R., Williams, and W. L., Wolfe, Handbook of Optics Volume II Devices, Measurements, and Properties, 2 ed., McGraw-Hill, New York (1995).
16. S. R., Cloude and E., Pottier, " Concept of polarization entropy in optical scattering, ", Opt. Eng., 34 (6), 1599-1610 (1995). gar OPEGAR 0091-3286 10.1117/12.202062
17. S., Cloude, " Group theory and polarisation algebra, ", Optik (Stuttgart), 75, 26-36 (1986). oti OTIKAJ 0030-4026
18. D. M., Hayes, " Error propagation in decomposition of Mueller matrices, ", Proc. SPIE, 3121, 112-123 (1997). spi PSISDG 0277-786X
19. C., Browne and F. W., Zerban, Physical and Chemical Methods of Sugar Analysis, 3rd ed., John Wiley and Sons, New York (1948).
20. E. D., Palik, Handbook of Optical Constants of Solids II, Academic Press, San Diego, CA (1991).
21. P., Hauge, R. H., Mueller, and C., Smith, " Conventions and formulas for using the Mueller-Stokes calculus in ellipsometry, ", Surf. Sci., 96, 81-107 (1980). sus SUSCAS 0039-6028 10.1016/0039-6028(80)90296-4
22. S., Lu and R., Chimpan, " Interpretation of mueller matrices based on polar decomposition, ", J. Opt. Soc. Am. A, 13, 1106-113 (1996). joa JOAOD6 0740-3232
23. S., Manhas, M. K., Swami, P., Buddhiwant, N., Ghosh, P. K., Gupta, and K., Singh, " Mueller matrices approcah for determination of optical rotation in chiral turbid media in backscattering geometry, ", Opt. Express, 14, 190-202 (2006). 8mi OPEXFF 1094-4087 10.1364/OPEX.14.000190
24. J. J., Gil and E., Bernabeu, " Depolarization and polarization indices of an optical system, ", J. Mod. Opt., 33, 185-189 (1986).