SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 33, Issue 2, 2010, Pages 37-41

Electrophoretic light scattering for surface zeta potential measurement of ALD metal oxide films

(6) Gu, Diefeng a,b Yalcin, Sinan Eren a Baumgart, Helmut a,b Qian, Shizhi a Baysal, Oktay a Beskok, Ali a

a Old Dominion University (United States)

b THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; CHLORINE COMPOUNDS; ELECTROLYTES; LIGHT SCATTERING; OXIDE MINERALS; PH; POTASSIUM COMPOUNDS; TITANIUM DIOXIDE; TRANSITION METAL OXIDES; TRANSITION METALS; ZETA POTENTIAL; ZIRCONIA;

AL2O3 FILMS; ELECTROLYTE CONCENTRATION; ELECTROPHORETIC LIGHT SCATTERING; ISO-ELECTRIC POINTS; METAL OXIDE FILM; PH VALUE; SURFACE ZETA POTENTIAL; TITANIA;

OXIDE FILMS;

EID: 79952571001 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3485239 Document Type: Conference Paper

Times cited : (9)

References (10)

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6
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.