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Volumn 36, Issue 1, 2011, Pages 97-103

Growth of vertically aligned carbon nanotubes by DCPECVD system and the effects of C2H2 concentration and plasma current on the growth behavior of CNTS

Author keywords

Carbon nanotubes; MOSFET; PECVD; Vertical aligned growth

Indexed keywords


EID: 79952372900     PISSN: 2193567X     EISSN: 21914281     Source Type: Journal    
DOI: 10.1007/s13369-010-0001-0     Document Type: Article
Times cited : (4)

References (16)
  • 1
    • 0342819025 scopus 로고
    • Helical microtubules of graphitic carbon
    • Iijima S. (1991) Helical microtubules of graphitic carbon. Nature 354:56-58
    • (1991) Nature , vol.354 , pp. 56-58
    • Iijima, S.1
  • 2
    • 0000095442 scopus 로고    scopus 로고
    • High Yeild of single wall carbon nanotube by ARC discharge using Rh-Pt mixed catalyst
    • Saito Y, Tani Y, Miyagawa N, Mitsushima K, Kasuya A, Nishina Y. (1998) High Yeild of single wall carbon nanotube by ARC discharge using Rh-Pt mixed catalyst. Chem Phys Lett 294:593-598
    • (1998) Chem Phys Lett , vol.294 , pp. 593-598
    • Saito, Y.1    Tani, Y.2    Miyagawa, N.3    Mitsushima, K.4    Kasuya, A.5    Nishina, Y.6
  • 3
    • 0038033665 scopus 로고
    • Single-shell carbon nanotubes of 1-um diameter
    • Iijima S, Lchihashi T. (1993) Single-shell carbon nanotubes of 1-um diameter. Nature 603:603-606
    • (1993) Nature , vol.603 , pp. 603-606
    • Iijima, S.1    Lchihashi, T.2
  • 4
    • 58149212911 scopus 로고
    • Catalitic growth of single walled carbon nanotubes by laser vaporization
    • Guo T, Nikolaev P, Thess A, Colbert DT, Smalley RE. (1995) Catalitic growth of single walled carbon nanotubes by laser vaporization. Chem Phys Lett 243:49-53
    • (1995) Chem Phys Lett , vol.243 , pp. 49-53
    • Guo, T.1    Nikolaev, P.2    Thess, A.3    Colbert, D.T.4    Smalley, R.E.5
  • 5
    • 0031585471 scopus 로고    scopus 로고
    • Single-wall carbon nanotube formation by laser ablation using double targets of carbon and metals
    • YudasakaM, Komatsu T, Ichihashi T, Iijima S. (1997) Single-wall carbon nanotube formation by laser ablation using double targets of carbon and metals. Chem Phys Lett 278:102-105
    • (1997) Chem Phys Lett , vol.278 , pp. 102-105
    • Yudasaka, M.1    Komatsu, T.2    Ichihashi, T.3    Iijima, S.4
  • 6
    • 0031578994 scopus 로고    scopus 로고
    • Transition metal surface decorated fullerenes as possible catalytic agents for the creation of single walled nanotubes of uniform diameter
    • Birkett R, Cheetham AJ, Eggen BR, Hare JP et al. (1997) Transition metal surface decorated fullerenes as possible catalytic agents for the creation of single walled nanotubes of uniform diameter. Chem Phys Lett 281:111-115
    • (1997) Chem Phys Lett , vol.281 , pp. 111-115
    • Birkett, R.1    Cheetham, A.J.2    Eggen, B.R.3    Hare, J.P.4
  • 8
    • 0035809545 scopus 로고    scopus 로고
    • Effect of catalyst film thickness on carbon nanotube growth by selective area chemical vapor deposition
    • Wei YY, Eres G, Merkulov VI, Lowndes DH. (2001) Effect of catalyst film thickness on carbon nanotube growth by selective area chemical vapor deposition. Appl Phys Lett 78:1394-1396
    • (2001) Appl Phys Lett , vol.78 , pp. 1394-1396
    • Wei, Y.Y.1    Eres, G.2    Merkulov, V.I.3    Lowndes, D.H.4
  • 10
    • 27344459104 scopus 로고    scopus 로고
    • Carbon nanotube tips for scaning probe microscopy: fabrication and high aspect ratio nanometrology
    • Nguyen CV, Ye Q, Meyyappan M. (2005) Carbon nanotube tips for scaning probe microscopy: fabrication and high aspect ratio nanometrology. Meas Sci Technol 16:2138-2145
    • (2005) Meas Sci Technol , vol.16 , pp. 2138-2145
    • Nguyen, C.V.1    Ye, Q.2    Meyyappan, M.3
  • 11
    • 0037016607 scopus 로고    scopus 로고
    • Carbon nanowalls growth by microwave plasma enhanced chemical vapor deposition
    • Wu Y, Qiao P, Chong T, Shen Z. (2002) Carbon nanowalls growth by microwave plasma enhanced chemical vapor deposition. Adv Mater 14:64-68
    • (2002) Adv Mater , vol.14 , pp. 64-68
    • Wu, Y.1    Qiao, P.2    Chong, T.3    Shen, Z.4
  • 12
    • 29144452840 scopus 로고    scopus 로고
    • Micro- and nanoimmunosensores: technology and applications
    • Lechuga LM. (2006) Micro- and nanoimmunosensores: technology and applications. Anal Bioanal Chem 384:44-48
    • (2006) Anal Bioanal Chem , vol.384 , pp. 44-48
    • Lechuga, L.M.1
  • 13
    • 1142305245 scopus 로고    scopus 로고
    • A simple purification for single-walled carbon nanotubes
    • Popov VN. (2004) A simple purification for single-walled carbon nanotubes. Mat Sci Eng R 43:61-65
    • (2004) Mat Sci Eng R , vol.43 , pp. 61-65
    • Popov, V.N.1
  • 14
    • 0035424222 scopus 로고    scopus 로고
    • Growth of alligned carbon nanotubes by plasma-enhanced chemical vapor deposition: optimization of growth parameters
    • Tanemura M, Iwata K, Takahashi K, Fujimoto Y, Okuyama F, Sugie H, Filip V. (2001) Growth of alligned carbon nanotubes by plasma-enhanced chemical vapor deposition: optimization of growth parameters. J Appl Phys 90:1529-1532
    • (2001) J Appl Phys , vol.90 , pp. 1529-1532
    • Tanemura, M.1    Iwata, K.2    Takahashi, K.3    Fujimoto, Y.4    Okuyama, F.5    Sugie, H.6    Filip, V.7
  • 16
    • 11244335399 scopus 로고    scopus 로고
    • Effect of the growth temperature on the diameter distribution and chirality of single-wall Carbon nanotubes
    • Bandow S et al. (1998) Effect of the growth temperature on the diameter distribution and chirality of single-wall Carbon nanotubes. Phys Rev Lett 80:3779-3784
    • (1998) Phys Rev Lett , vol.80 , pp. 3779-3784
    • Bandow, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.