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Volumn 519, Issue 10, 2011, Pages 3221-3224
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Extracting thin film hardness of extremely compliant films on stiff substrates
a
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Author keywords
Hardness; Nanoindentation; Polymer; Substrate effects; Thin film
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Indexed keywords
CONTACT AREAS;
CONTACT STIFFNESS;
ELASTIC MISMATCH;
ELASTIC PROPERTIES;
INDENTATION DEPTH;
MISMATCHED SUBSTRATES;
PERFLUOROCYCLOBUTYL POLYMERS;
PHARR METHOD;
PILE-UPS;
POLYMER THIN FILMS;
SHEAR MODULUS;
SI SUBSTRATES;
SUBSTRATE EFFECTS;
THIN FILM HARDNESS;
ELASTIC MODULI;
HARDNESS;
NANOINDENTATION;
PLASTIC FILMS;
POLYMER FILMS;
POLYMERIC FILMS;
POLYMERS;
SEMICONDUCTING SILICON COMPOUNDS;
SURFACE ROUGHNESS;
THIN FILMS;
SUBSTRATES;
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EID: 79952313417
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.12.167 Document Type: Article |
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Times cited : (15)
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References (11)
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