메뉴 건너뛰기




Volumn 96, Issue 4, 2011, Pages 561-565

Characteristics and durability of fluoropolymer thin films

Author keywords

Atomic force microscopy; Etchant; Fluoropolymer; pH; Wetting; X ray photoelectron spectroscopy

Indexed keywords

ACIDIC AQUEOUS SOLUTION; AQUEOUS LIQUIDS; AQUEOUS SOLUTIONS; CHARACTERISATION; DEEP REACTIVE ION ETCHING; DYNAMIC WETTING MEASUREMENTS; ETCHANT; FLUOROPOLYMER; MICROELECTROMECHANICAL SYSTEMS; SEM;

EID: 79952186806     PISSN: 01413910     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymdegradstab.2010.12.022     Document Type: Article
Times cited : (9)

References (19)
  • 1
    • 0003950677 scopus 로고    scopus 로고
    • A method of anisotropically etching silicon
    • US Patent No. 5,501,893
    • Lärmer F, Schlip A. A method of anisotropically etching silicon, Licensed from Robert Bosch GmbH. US Patent No. 5,501,893; 1996.
    • (1996) Licensed from Robert Bosch GmbH.
    • Lärmer Schlip, F.A.1
  • 2
    • 2142699718 scopus 로고    scopus 로고
    • Deep reactive ion etch conditioning recipe
    • M, Wasilik, and N. Chen Deep reactive ion etch conditioning recipe P Soc Photo-Opt Ins vol. 5342 2004 103 110
    • (2004) P Soc Photo-Opt Ins , vol.5342 , pp. 103-110
    • Wasilik, M.1    Chen, N.2
  • 3
    • 0028112830 scopus 로고
    • Materials analysis of fluorocarbon films for MEMS applications
    • (Oiso, Jpn)
    • Elders J, Jansen HV, Elwenspoek M. Materials analysis of fluorocarbon films for MEMS applications. In: Proc. IEEE MEMS (Oiso, Jpn); 1994. p. 170-175.
    • (1994) Proc. IEEE MEMS , pp. 170-175
    • Elders, J.1    Jansen, H.V.2    Elwenspoek, M.3
  • 5
    • 16244389652 scopus 로고    scopus 로고
    • Surface modification of paper and cellulose by plasma-assisted deposition of fluorocarbon films
    • DOI 10.1016/j.surfcoat.2004.10.013, PII S0257897204009880
    • S. Vaswani, J. Koskinen, and D.W. Hess Surface modification of paper and cellulose by plasma-assisted deposition of fluorocarbon films Surf Coat Technol 195 2005 121 129 (Pubitemid 40464974)
    • (2005) Surface and Coatings Technology , vol.195 , Issue.2-3 , pp. 121-129
    • Vaswani, S.1    Koskinen, J.2    Hess, D.W.3
  • 6
    • 0035971844 scopus 로고    scopus 로고
    • Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels
    • DOI 10.1016/S0925-4005(00)00675-4, PII S0925400500006754
    • H. Andersson, W. van der Wijngaart, P. Griss, F. Niklaus, and G. Stemme Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels Sens Actuators B Chem 75 2001 136 141 (Pubitemid 32408937)
    • (2001) Sensors and Actuators, B: Chemical , vol.75 , Issue.1-2 , pp. 136-141
    • Andersson, H.1    Van Der Wijngaart, W.2    Griss, P.3    Niklaus, F.4    Stemme, G.5
  • 7
    • 14944362398 scopus 로고    scopus 로고
    • Fabrication of PDMS stamps for the patterned growth of carbon nanotubes
    • DOI 10.1016/j.mee.2005.01.019, PII S0167931705000225, Proceedings of the 30th International Conference on Micro- and Nano-Engineering
    • P. Argyrakis, L. Teo, T. Stevenson, and R. Cheung Fabrication of PDMS stamps for the patterned growth of carbon nanotubes Microelectronics Eng 78-79 2005 647 652 (Pubitemid 40371030)
    • (2005) Microelectronic Engineering , vol.78-79 , Issue.1-4 , pp. 647-652
    • Argyrakis, P.1    Teo, L.2    Stevenson, T.3    Cheung, R.4
  • 8
    • 23944514294 scopus 로고    scopus 로고
    • The growth and chemical structure of thin photonic films formed from plasma copolymerization. Part II. Effect of monomer feed location
    • DOI 10.1016/j.polymer.2005.06.051, PII S0032386105008116
    • H. Jiang, J.T. Grant, K. Eyink, S. Tullis, J. Enlow, and T.J. Bunning The growth and chemical structure of thin photonic films formed from plasma copolymerization. Part II. Effect of monomer feed location Polymer 46 2005 8178 8184 (Pubitemid 41203041)
    • (2005) Polymer , vol.46 , Issue.SPEC. ISS. , pp. 8178-8184
    • Jiang, H.1    Grant, J.T.2    Eyink, K.3    Tullis, S.4    Enlow, J.5    Bunning, T.J.6
  • 9
    • 25444447661 scopus 로고    scopus 로고
    • The growth and characterization of photonic thin films
    • DOI 10.1016/j.vacuum.2005.07.022, PII S0042207X05002575
    • J.T. Grant, H. Jiang, S. Tullis, W.E. Johnson, K. Eyink, and P. Fleitz The growth and characterization of photonic thin films Vacuum 80 2005 12 19 (Pubitemid 41376338)
    • (2005) Vacuum , vol.80 , Issue.1-3 , pp. 12-19
    • Grant, J.T.1    Jiang, H.2    Tullis, S.3    Johnson, W.E.4    Eyink, K.5    Fleitz, P.6    Bunning, T.J.7
  • 10
    • 0000438076 scopus 로고    scopus 로고
    • Characterizing the remote plasma polymerization of octafluorocyclobutane induced by RF-driven hollow-cathode discharge
    • PII S0257897297001473
    • K.P. Ningel, D. Theirich, and J. Engemann Characterizing the remote plasma polymerization of octafluorocyclobutane induced by RF-driven hollow-cathode discharge Surf Coat Technol 98 1998 1142 1147 (Pubitemid 128397044)
    • (1998) Surface and Coatings Technology , vol.98 , Issue.1-3 , pp. 1142-1147
    • Ningel, K.P.1    Theirich, D.2    Engemann, J.3
  • 11
    • 0001839574 scopus 로고
    • Relation of the equilibrium contact angle to liquid and solid constitution
    • W.A. Zisman Relation of the equilibrium contact angle to liquid and solid constitution Adv Chem Ser 43 1964 1 51
    • (1964) Adv Chem ser , vol.43 , pp. 1-51
    • Zisman, W.A.1
  • 12
    • 8844263773 scopus 로고    scopus 로고
    • The growth and chemical structure of thin photonic films formed from plasma copolymerization: I. Effect of monomer feed ratio
    • DOI 10.1016/j.polymer.2004.09.071, PII S0032386104009577
    • H. Jiang, J.T. Grant, S. Tullis, K. Eyink, P. Fleitz, and T.J. Bunning The growth and chemical structure of thin photonic films formed from plasma copolymerization. Part I. Effect of monomer feed ratio Polymer 45 2004 8475 8483 (Pubitemid 39535540)
    • (2004) Polymer , vol.45 , Issue.25 , pp. 8475-8483
    • Jiang, H.1    Grant, J.T.2    Tullis, S.3    Eyink, K.4    Fleitz, P.5    Bunning, T.J.6
  • 15
    • 47149110708 scopus 로고    scopus 로고
    • Extended Stoney's formula for a film-substrate bilayer with the effect of interfacial slip
    • Y.J. Zhang Extended Stoney's formula for a film-substrate bilayer with the effect of interfacial slip J App Mech 75 2008 1 9
    • (2008) J App Mech , vol.75 , pp. 1-9
    • Zhang, Y.J.1
  • 16
    • 77953399833 scopus 로고    scopus 로고
    • Corner rounding in EUV photoresist: Tuning through molecular weight, PAG size, and development time
    • C.N. Anderson, J. Daggett, and P.P. Naulleau Corner rounding in EUV photoresist: tuning through molecular weight, PAG size, and development time Proc SPIE vol. 7636 2010 763617
    • (2010) Proc SPIE , vol.7636 , pp. 763617
    • Anderson, C.N.1    Daggett, J.2    Naulleau, P.P.3
  • 17
    • 15344349685 scopus 로고    scopus 로고
    • Smooth etching of silicon using TMAH and isopropyl alcohol for MEMS applications
    • DOI 10.1016/j.mee.2004.11.004, PII S0167931704005131
    • K.B. Sundaram, A. Vijayakumar, and G. Subramanian Smooth etching of silicon using TMAH and isopropyl alcohol for MEMS applications Microelectronics Eng 77 2005 230 241 (Pubitemid 40391466)
    • (2005) Microelectronic Engineering , vol.77 , Issue.3-4 , pp. 230-241
    • Sundaram, K.B.1    Vijayakumar, A.2    Subramanian, G.3
  • 18
    • 33645054820 scopus 로고    scopus 로고
    • Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon
    • K. Biswas, and S. Kal Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon Microelectronics J 37 2006 519 525
    • (2006) Microelectronics J , vol.37 , pp. 519-525
    • Biswas, K.1    Kal, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.