Thin film thermoelectric energy harvesters for MEMS micropower generation

2010 International Conference on Energy Aware Computing, ICEAC 2010

Volumn , Issue , 2010, Pages

  Topal, Emre Tan ^a   Kulah, Haluk ^a   Muhtaroglu, Ali ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Heat transfer; Micropower generation; Seebeck effect; Thermoelectric energy harvesting

Indexed keywords

COMPUTER PLATFORMS; DOPED SILICON; ENERGY HARVESTER; FINITE ELEMENT ANALYSIS; HEAT ENERGY; HOT SPOT; HYBRID MODE; MEMS INTEGRATED; MEMSDEVICES; MICROPOWER GENERATION; MODELING AND OPTIMIZATION; OPTIMIZATION ALGORITHMS; PARYLENES; PERFORMANCE EVALUATION; POWER DENSITIES; POWER LEVELS; TEMPERATURE DIFFERENCES; THERMOELECTRIC ENERGY; THERMOELECTRIC GENERATORS;

BISMUTH; DESIGN; FINITE ELEMENT METHOD; HARVESTERS; HARVESTING; HEAT TRANSFER; HYBRID MATERIALS; OPTIMIZATION; PHOSPHORUS; POLYSILICON; THERMOCOUPLES; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THERMOPILES; THIN FILMS;

ENERGY HARVESTING;

EID: 79952014759     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEAC.2010.5702321     Document Type: Conference Paper

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