A CMOS interdigital capacitive humidity sensor with polysilicon heaters

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 382-385

  Zhao, Cheng Long ^a   Huang, Qing An ^a   Qin, Ming ^a   Li, Wei Hua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AL ELECTRODE; CAPACITIVE HUMIDITY SENSORS; FILLING EFFECTS; INTERDIGITAL; INTERDIGITAL ELECTRODE; MEASURED RESULTS; SENSING MATERIAL;

ELECTRODES; HUMIDITY SENSORS; PASSIVATION; POLYSILICON;

POLYIMIDES;

EID: 79951933051     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690220     Document Type: Conference Paper

References (7)

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