Vapor-phase self-assembled monolayers for improved MEMS reliability

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 767-770

  Rissanen, Anna ^a   Tappura, Kirsi ^a   Laamanen, Mari ^a   Puurunen, Riikka ^a   Färm, Elina ^b   Ritala, Mikko ^b   Leskelä, Markku ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COATED COMPONENTS; COATED STRUCTURE; DICHLORODIMETHYLSILANE; HIGH ASPECT RATIO; HUMIDITY EXPOSURES; LONG TERM STABILITY; MEMS RELIABILITY; MEMS/NEMS; N-OCTADECYLTRIMETHOXYSILANE; OPTICAL MEMS; PRE-TREATMENTS; SAMS; STATIC WATER; THERMAL STABILITY; VAPOR PHASE;

ANGLE MEASUREMENT; ASPECT RATIO; COATINGS; CONTACT ANGLE; ELECTRON ENERGY LEVELS; FLEXIBLE STRUCTURES; MOEMS; ORGANIC POLYMERS; SENSORS; STICTION; THERMODYNAMIC STABILITY; VAPORS;

SELF ASSEMBLED MONOLAYERS;

EID: 79951910726     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690769     Document Type: Conference Paper

References (4)

1. W.R. Ashurst, C. Carraro, M. Maboudian, and W. Frey, "Wafer level anti-stiction coatings for MEMS", Sens. Actuators A, Phys., vol. 104, no. 3, p. 151-221, 2003
2. Y.X. Zhuang, O. Hansen, T. Knieling, C. Wang, P. Rombach, W. Lang, W. Benecke, M. Kehlenbeck, and J. Koblitz, "Vapor-phase selfassembled monolayers for anti-stiction applications in MEMS", J. of Microelectromechanical Systems, vol. 16, no. 6, pp. 1451-1460, December 2007.
3. H. Sugimura, A. Hozumi, T. Kameyama, and O. Takai, "Organosilane self-assembled monolayers formed at the vapour/solid interface", Surf. Interface Anal., vol 34, pp. 550-554, 2002
4. E. Färm, M. Kemell, M. Ritala, and M. Leskelä, "Self-assembled octadecyltrimethoxysilane monolayers enabling selective-area atomic layer deposition of iridium", Chem. Vap. Deposition, vol 12, pp. 415-417, 2006