Development of a miniaturized NO2 gas sensor based on nanoparticles WO3 thin film on interdigitated electrodes

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1254-1257

  Dao, Dzung Viet ^a   Li, Ling Han ^b,c   Hashishin, Takeshi ^b   Tamaki, Jun ^b   Shibuya, Kyoji ^a   Sugiyama, Susumu ^a  

^a G Device Center Kansai   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLED FIELDS; ELECTRICAL CONDUCTANCE; GAS SENSORS; HIGH SENSITIVITY; INTER-DIGITATED ELECTRODES; MICRO-HEATERS; OPERATING TEMPERATURE; POROUS NANOPARTICLES; PT ELECTRODE; SEMICONDUCTING METAL OXIDES; SENSING MATERIAL; THERMAL ISOLATION;

DIAPHRAGMS; ELECTRODES; FABRICATION; GAS DETECTORS; METALLIC COMPOUNDS; NANOPARTICLES; PLATINUM; THIN FILMS;

CHEMICAL SENSORS;

EID: 79951884305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690604     Document Type: Conference Paper

References (10)

1. 2", Chem. Lett. 1991 (1991) pp. 1611-1614.
2. 3 thin film micro sensors", Sensors and Actuators B 108 (2005), pp. 202-206.
3. 2 Detection", Sensors and Actuators B, Vol.132, (2008), pp. 234-238.
4. 2 gas sensor combining an MIS with a solid electrolyte", Sensors and Actuators B Vol. 109, Issue 2, (2005), pp. 216-220.
5. K.Sadek and W.Moussa, "MEMS Design for Fabrication", Proceedings of the 2005 International Conference on MEMS, NANO and Smart Systems (ICMENS'05) 0-7695-2398-6/05© 2005 IEEE.
6. K. Kanda, T. Maekawa, "Development of a WO3 thick-film-based sensor for the detection of VOC", Sensors and Actuators B Vol. 108 (2005), pp. 97-101.
7. J. Tamaki, A. Hayashi, Y. Yamamoto, M. Matsuoka, "Detection of dilute nitrogen dioxide and thickness effect of tungsten oxide thin film sensors", Sensors and Actuators B 95 (2003) pp. 111-115.
8. 2 sensing characteristics of WO3 thin film micro gas sensor", Sensor and Actuators B, Vol 93, Issues 1-3, (2003), pp. 463-467.
9. G. Wiche , A. Berns, H. Steffes, E. Obermeier, "Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors", Sensors and Actuators A 123-124 (2005) 12-17 (Pubitemid 41315824)
10. th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), (2008), Taiwan.