Measurement of the valence band structure in dielectric films by a focused ion beam

Applied Physics Letters

Volumn 98, Issue 6, 2011, Pages

  Uhm, Han S ^a   Hong, Young J ^a   Choi, Eun H ^a   Kim, Do Y ^a  

^a Kwangwoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER NEUTRALIZATION; ENERGY DISTRIBUTIONS; NUMERICAL CALCULATION; STATE DENSITIES;

AUGERS; CONVOLUTION; DIELECTRIC DEVICES; DIELECTRIC FILMS; ION BEAMS;

VALENCE BANDS;

EID: 79951807419     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3554433     Document Type: Article

References (21)

1. Y. Motoyama, Y. Hirano, K. Ishii, Y. Murakami, and F. Sato, J. Appl. Phys. 0021-8979 95, 8419 (2004). 10.1063/1.1751239
2. H. S. Uhm, E. H. Choi, and G. S. Cho, Appl. Phys. Lett. 0003-6951 78, 592 (2001). 10.1063/1.1343492 (Pubitemid 33661934)
3. H. S. Uhm, E. H. Choi, and G. S. Cho, Appl. Phys. Lett. 0003-6951 94, 031501 (2009). 10.1063/1.3073983
4. Y. Motoyama, Y. Murakami, M. Seki, T. Kurauchi, and N. Kikuchi, IEEE Trans. Electron Devices 0018-9383 54, 1308 (2007). 10.1109/TED.2007.896363 (Pubitemid 46864765)
5. K. Y. Tsou and E. B. Hensky, J. Appl. Phys. 0021-8979 45, 47 (1974). 10.1063/1.1663005
6. P. D. Johnson, Phys. Rev. 0031-899X 94, 845 (1954). 10.1103/PhysRev.94. 845
7. D. M. Roessler and W. C. Walker, Phys. Rev. 0031-899X 159, 733 (1967). 10.1103/PhysRev.159.733
8. C. Y. Fong, W. Saslow, and M. L. Cohen, Phys. Rev. 0031-899X 168, 992 (1968). 10.1103/PhysRev.168.992
9. Y. Toda, H. Yanagi, E. Ikenaga, J. J. Kim, M. Kobata, S. Ueda, T. Kamiya, M. Hirano, K. Kobayashi, and H. Hosono, Adv. Mater. 0935-9648 19, 3564 (2007). 10.1002/adma.200700663 (Pubitemid 350134601)
10. H. H. Glascock and E. B. Hensley, Phys. Rev. 0031-899X 131, 649 (1963). 10.1103/PhysRev.131.649
11. R. A. Powell, W. E. Spicer, and J. C. McMenamin, Phys. Rev. B 0556-2805 6, 3056 (1972). 10.1103/PhysRevB.6.3056
12. J. M. Themlin, R. Sporken, J. Darville, R. Caudano, and J. M. Gilles, Phys. Rev. B 0556-2805 42, 11914 (1990). 10.1103/PhysRevB.42.11914
13. L. Ley, R. A. Pollak, F. R. McFeely, S. P. Kowalczyk, and D. A. Shirley, Phys. Rev. B 0556-2805 9, 600 (1974). 10.1103/PhysRevB.9.600
14. D. A. Shirley, Phys. Rev. B 0556-2805 5, 4709 (1972). 10.1103/PhysRevB.5.4709
15. D. C. Reynolds, D. C. Look, and B. Jogai, Phys. Rev. B 0556-2805 60, 2340 (1999). 10.1103/PhysRevB.60.2340
16. H. D. Hagstrum, Phys. Rev. 0031-899X 119, 940 (1960). 10.1103/PhysRev.119.940
17. T. Tsujita, T. Nagatomi, Y. Takai, Y. Morita, M. Nishitani, M. Kitagawa, and T. Uenoyama, Jpn. J. Appl. Phys., Part 2 0021-4922 43, L753 (2004). 10.1143/JJAP.43.L753
18. T. Nagatomi, T. Kuwayama, Y. Takai, K. Yoshino, Y. Morita, M. Kitagawa, and M. Nishitani, Appl. Phys. Lett. 0003-6951 92, 084104 (2008). 10.1063/1.2888957 (Pubitemid 351323121)
19. E. H. Choi, H. J. Oh, Y. G. Kim, J. J. Ko, J. Y. Lim, J. G. Kim, D. I. Kim, G. Cho, and S. O. Kang, Jpn. J. Appl. Phys., Part 1 0021-4922 37, 7015 (1998). 10.1143/JJAP.37.7015
20. H. D. Hagstrum, Phys. Rev. 0031-899X 96, 336 (1954). 10.1103/PhysRev.96. 336
21. F. Reif, Fundamentals of Statistical and Thermal Physics (McGraw-Hill, New York, 1965), Chap.