메뉴 건너뛰기




Volumn 39, Issue 6, 2010, Pages 1044-1048

Interaction mechanism of femtosecond laser and wide band-gap material

Author keywords

Ablation threshold; Femtosecond laser; Material ablation mechanisms; SiC

Indexed keywords

ABLATION PROCESS; ABLATION THRESHOLDS; ANALYTICAL TECHNOLOGY; DAMAGED REGION; ELECTRO MICROSCOPY; FEMTOSECOND LASER; HARD MATERIAL; INCIDENT LASER; INTERACTION MECHANISMS; KEY PARAMETERS; MATERIAL ABLATION; MATERIAL ABLATION MECHANISMS; MICRO TOPOGRAPHY; NEAR INFRARED; PROCESSING PARAMETERS; SEM; SIC; WIDE BAND GAP; WIDE BAND-GAP MATERIAL;

EID: 79951800000     PISSN: 10072276     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (11)

References (10)
  • 1
    • 33646516671 scopus 로고    scopus 로고
    • Visible-infrared femtosecond laser-induced optical breakdown of 6H-SiC
    • CHEN Hong-xin, JIA Tian-qing, HUANG Min, et al. Visible-infrared femtosecond laser-induced optical breakdown of 6H-SiC [J]. Acta Optica Sinica, 2006, 26 (3): 467-470.
    • (2006) Acta Optica Sinica , vol.26 , Issue.3 , pp. 467-470
    • Chen, H.-X.1    Jia, T.-Q.2    Huang, M.3
  • 2
    • 0002579613 scopus 로고    scopus 로고
    • Development in grinding of ceramic materials
    • UHLMANN E. Development in grinding of ceramic materials [J]. Abrasive Magazine, 1998: 28-34.
    • (1998) Abrasive Magazine , pp. 28-34
    • Uhlmann, E.1
  • 3
    • 0041762041 scopus 로고    scopus 로고
    • Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon
    • DONG Y, MOLIAN P. Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon [J]. Appl Phys A, Materials Science Processing, 2003, 77: 839-846.
    • (2003) Appl Phys A, Materials Science Processing , vol.77 , pp. 839-846
    • Dong, Y.1    Molian, P.2
  • 4
    • 0030211787 scopus 로고    scopus 로고
    • Femtosecond, picosecond, and nanosecond laser ablation of solids
    • CHICHKOV B N, MOMMA C, NOLTE S, et al. Femtosecond, picosecond, and nanosecond laser ablation of solids [J]. Appl Phys A, 1996, 63 (2): 109-115.
    • (1996) Appl Phys A , vol.63 , Issue.2 , pp. 109-115
    • Chichkov, B.N.1    Momma, C.2    Nolte, S.3
  • 5
    • 33748249083 scopus 로고    scopus 로고
    • Laser micro machining of 3C-SiC single crystals
    • ZOPPEL S, FARSARI M, MERZ R, et al. Laser micro machining of 3C-SiC single crystals [J]. Microelectronic Engineering, 2006, 83: 1400-1402.
    • (2006) Microelectronic Engineering , vol.83 , pp. 1400-1402
    • Zoppel, S.1    Farsari, M.2    Merz, R.3
  • 6
    • 78649987905 scopus 로고    scopus 로고
    • Study of the ultrafast dynamic process of intense femtosecond laser ablation of solid targets
    • ZHANG Nan, LIANG Yan-mei, WANG Ming-wei, et al. Study of the ultrafast dynamic process of intense femtosecond laser ablation of solid targets [J]. China Basic Science, 2008: 21-23.
    • (2008) China Basic Science , pp. 21-23
    • Zhang, N.1    Liang, Y.-M.2    Wang, M.-W.3
  • 7
    • 0012027653 scopus 로고    scopus 로고
    • Femtosecond laser ablation of silicon-modification thresholds and morphology
    • BONSE J, BAUDACH S, KRUGER J, et al. Femtosecond laser ablation of silicon-modification thresholds and morphology [J]. Appl Phys A, 2002, 74: 19-25.
    • (2002) Appl Phys A , vol.74 , pp. 19-25
    • Bonse, J.1    Baudach, S.2    Kruger, J.3
  • 8
    • 35949017257 scopus 로고
    • Growth of spontaneous periodic surface structures on solids during laser illumination
    • ZHOU G S, FAUCHET P M, SIEGMAN A E. Growth of Spontaneous Periodic Surface Structures on Solids during Laser Illumination [J]. Physical Review B, 1982, 26 (10): 5366-5381.
    • (1982) Physical Review B , vol.26 , Issue.10 , pp. 5366-5381
    • Zhou, G.S.1    Fauchet, P.M.2    Siegman, A.E.3
  • 9
    • 0036423947 scopus 로고    scopus 로고
    • Laser ablation thresholds of silicon for different pulse durations: Theory and experiment
    • JESCHKE H O, GARCIA M E, LENZNER M, et al. Laser ablation thresholds of silicon for different pulse durations: theory and experiment [J]. Appl Surf Sci, 2002, 197-198: 839-844.
    • (2002) Appl Surf Sci , vol.197-198 , pp. 839-844
    • Jeschke, H.O.1    Garcia, M.E.2    Lenzner, M.3
  • 10
    • 0141573528 scopus 로고    scopus 로고
    • Femto-second pulsed laser micro-machining of single crystalline 3C-SiC structures based on laser-induced defect-activation process
    • DONG Y Y, ZORMAN C, MOLIAN P. Femto-second pulsed laser micro-machining of single crystalline 3C-SiC structures based on laser-induced defect-activation process [J]. Journal of Micromechanics and Microengineering, 2003, 13: 680-685.
    • (2003) Journal of Micromechanics and Microengineering , vol.13 , pp. 680-685
    • Dong, Y.Y.1    Zorman, C.2    Molian, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.