Measurement of micro gears - Comparison of optical, tactile-optical and CT-measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7864, Issue , 2011, Pages

  Neuschaefer Rube, U ^a   Bartscher, M ^a   Neukamm, M ^a   Neugebauer, M ^a   Hartig F ^a   Goebbels, J ^b   Ehrig, K ^b   Staude, A ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Computed tomography; Coordinate metrology; Micro gears; Optical sensors; Tactile probes

Indexed keywords

CARTESIAN COORDINATE; COMPUTED TOMOGRAPHY; COORDINATE METROLOGY; CT DATA; FIBER PROBE; FOCUS VARIATION; GEAR PARAMETER; HIGH PRECISION; IMAGING SENSORS; MEASUREMENT DATA; MICRO GEAR; MICRO PLANETARY GEAR; MICRO-CT SYSTEMS; MICRO-PROBES; OPTICAL DATA; OPTICAL MEASUREMENT; OPTICAL PROBE; PIEZO-RESISTIVE; POINT DENSITY; PRECISE MEASUREMENTS; SINGLE POINT; SYNCHROTRON-CT; TACTILE PROBES; TACTILE PROBING;

GEAR TEETH; IMAGE PROCESSING; IMAGING SYSTEMS; OPTICAL DATA PROCESSING; OPTICAL SENSORS; OPTICAL VARIABLES MEASUREMENT; PROBES; THREE DIMENSIONAL;

COMPUTERIZED TOMOGRAPHY;

EID: 79951597145     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.872413     Document Type: Conference Paper

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