A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes

Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

  Maleki, T ^a   Chitnis, G ^a   Ziaie, B ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; BI-LAYER; CANTILEVER ACTUATORS; CONDUCTIVE CARBON; LOW ACTUATION VOLTAGE; MICROMACHINED; OUT-OF-PLANE DISPLACEMENT; POLYDIMETHYLSILOXANE PDMS; UNIMORPH STRUCTURE;

ACTUATORS; ELECTRODES; MICROCHANNELS;

SILICONES;

EID: 79551696342     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/2/027002     Document Type: Article

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