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Volumn 102, Issue 1, 2011, Pages 21-26
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Laser forward transfer based on a spatial light modulator
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Author keywords
[No Author keywords available]
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Indexed keywords
ADAPTIVE CONTROL;
APPLICATION OF LASER;
BEAM PATTERN;
BEAM SHAPES;
DIGITAL MICRO-MIRROR DEVICE;
FORWARD-TRANSFER;
INCIDENT LASER;
LASER DIRECT WRITE;
LITHOGRAPHIC PROCESSING;
NANO-MATERIALS;
PARADIGM SHIFTS;
PULSED UV-LASERS;
RE-CONFIGURABLE;
REAL TIME;
SIZE AND SHAPE;
SPATIAL LIGHT MODULATORS;
TECHNOLOGICAL ADVANCEMENT;
LASER BEAMS;
LIGHT MODULATION;
LIGHT MODULATORS;
LIGHT SOURCES;
LITHOGRAPHY;
PULSED LASERS;
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EID: 79551684313
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-010-6054-9 Document Type: Article |
Times cited : (53)
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References (12)
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