MEMS technology for optical data storage

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1762-1767

  Bu, J U ^a   Yee, Youngjoo ^a   Lee, See Hyung ^a   Kim, Jinhong ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Coils; Costs; Integrated optics; Lenses; Memory; Microactuators; Micromechanical devices; Optical devices; Optical diffraction; Optical refraction

Indexed keywords

ACTUATORS; COSTS; DATA STORAGE EQUIPMENT; DIGITAL STORAGE; INTEGRATED OPTICS; LENSES; MICROACTUATORS; MICROLENSES; MICROSYSTEMS; OPTICAL DEVICES; PICKUPS; SOLID-STATE SENSORS; TRANSDUCERS;

COILS; ENABLING TECHNOLOGIES; MICROMACHINED DEVICES; MICROMECHANICAL DEVICE; OPTICAL DIFFRACTIONS; OPTICAL FLYING HEADS; OPTICAL PICKUP MODULES; OPTICAL REFRACTION;

OPTICAL DATA STORAGE;

EID: 79251617277     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217127     Document Type: Conference Paper

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