From FIB-SIMS to SIMS-FIB. the prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 479-483

  McPhail, David S ^a   Li, Libing ^a   Chater, Richard J ^a   Yakovlev, Nikolai ^b   Seng, Hweeleng ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

depth profiling; FIB SIMS; imaging; mass spectra; sensitivity; yield enchancement

Indexed keywords

FIB-SIMS; IMAGING; MASS SPECTRA; SENSITIVITY; YIELD ENCHANCEMENT;

DEPTH PROFILING; MASS SPECTROMETERS; MASS SPECTROMETRY;

INSTRUMENTS;

EID: 78951492899     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3468     Document Type: Conference Paper

References (7)

1. J. M. Chabala, K. K. Soni, K. L. Gavrilov, R. Levi-Setti, High Resolution Chemical Imaging with Scanning Ion Probe SIMS, in International Journal of Mass Spectrometry and Ion Processes 1995, 143, 191.
2. F. A. Stevie, D. P. Griffiths, Quantification in Dynamic SIMS: Current Status and Future Needs, in Applied Surface Science 2008, 255, 1364.
3. R. J. Chater, D. S. McPhail, Applications of Focused Ion Beam SIMS in Materials Science, in Mikrochimica Acta 2008, 161, 387.
4. L. Li, D. S. McPhail, N. Yakovlev, H. Seng, Strategies for Improving the Sensitivity of Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS), ibid.
5. M. P. Ryan, D. E. Williams, R. J. Chater, B. M. Hutton, D. S. McPhail, Why Stainless Steel Corrodes, in Nature 2002, 415, 770.
6. O. T. Ngan, D. S. McPhail, R. J. Chater, B. A. Shollock, Isotope Exchange Studies of Oxidation Mechanisms in Nickel Base Superalloys Using FIB SIMS Techniques, Surface and Coatings Technology 2006, 201, 3885.
7. J. R. Silk, R. J. Dashwood, R. J. Chater, Determination of Lattice Orientation in Aluminium Alloy Grains by Low Energy Gallium Ion Channelling, to be published in Nuclear Instruments and Methods in Physical Research B, 2010.