Fabrication of regular patterned SERS arrays by electron beam Lithography

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 7715, Issue , 2010, Pages

  Huebner, U ^a   Schneidewind, H ^a   Cialla, D ^b   Weber, K ^b   Zeisberger, M ^a   Mattheis, R ^a   Moeller, R ^b   Popp, J ^a,b  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Analytics; Electron beam lithography; Regular patterned SERS arrays; SERS

Indexed keywords

ANALYTICS; ARGON ION BEAM; BIOLOGICAL APPLICATIONS; CROSSED GRATINGS; ELECTROMAGNETIC FIELD ENHANCEMENT; FABRICATION PROCESS; PLASMONIC; QUARTZ WAFERS; REGULAR PATTERNED SERS ARRAYS; REPRODUCIBILITIES; RESIST LAYERS; SEM; SERS; SHARP EDGES; SIGNAL INTENSITIES; SURFACE ENHANCED RAMAN SPECTROSCOPY;

ANALYTIC EQUIPMENT; ARGON; ELECTROMAGNETIC FIELDS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON OPTICS; HEALTH CARE; ION BEAMS; MAGNETIC FIELD EFFECTS; QUARTZ; RAMAN SPECTROSCOPY;

ELECTRONS;

EID: 78751606539     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854184     Document Type: Conference Paper

References (32)

1. M. Schmitt and J. Popp, "Raman spectroscopy at the beginning of the twenty-first century", Journal of Raman Spectroscopy 37, 20-28 (2006).
2. R. Petry, M. Schmitt and J. Popp, "Raman spectroscopy-a prospective tool in the life sciences", ChemPhysChem 4, 14-30, 2003.
3. M. Fleischmann, P. J. Hendra and A. J. McQuillan, "Raman spectra of pyridine adsorbed at a silver electrode", Chemical Physics Letters 26, 163-166 (1974).
4. M. G. Albrecht and J. A. Creighton, "Anomalously intense Raman spectra of pyridine at a silver electrode", Journal of the American Chemical Society 99, 5215-5217 (1977).
5. D. L. Jeanmaire and R. P. Van Duyne, "Surface Raman spectroelectrochemistry. Part I. Heterocyclic, aromatic, and aliphatic amines adsorbed on the anodized silver electrode", Journal of Electroanalytical Chemistry and Interfacial Electrochemistry 84, 1-20 (1977).
6. M. Baranska, H. Schulz, P. Rösch, M. A. Strehle and J. Popp, "Identification of secondary metabolites in medicinal and spice plants by NIR-FT-Raman microspectroscopic mapping", Analyst 129(10), 926-930 (2004).
7. C. Herrmann, J. Neugebauer, M. Presselt, U. Uhlemann, M. Schmitt, S. Rau, J. Popp and M. Reiher, "The first photoexcitation step of ruthenium-based models for artificial photosynthesis highlighted by resonance Raman spectroscopy", Journal of Physical Chemistry B 111(21), 6078-6087 (2007).
8. J. Popp and M. Schmitt, "Raman spectroscopy breaking terrestrial barriers!", Journal of Raman Spectroscopy 35(6), 429-432 (2004).
9. P. Roesch, M. Harz, M. Schmitt, K.-D. Peschke, O. Ronneberger, H. Burkhardt, H.-W. Motzkus, M. Lankers, S. Hofer, H. Thiele and J. Popp, "Chemotaxonomic identification of single bacteria by micro-Raman spectroscopy: Application to clean-room-relevant biological contaminations" , Applied and Environmental Microbiology 71(3), 1626-1637 (2005).
10. P. Roesch, M. Harz, K.-D. Peschke, O. Ronneberger, H. Burkhardt, A. Schuele, G. Schmauz, M. Lankers, S. Hofer, H. Thiele, H.-W. Motzkus and J. Popp, "On-line monitoring and identification of bioaerosols", Analytical Chemistry 78(7), 2163-2170 (2006).
11. P. Rosch, M. Schmitt, W. Kiefer and J. Popp, "The identification of microorganisms by micro-Raman spectroscopy", Journal of Molecular Structure 661, 363-369 (2003).
12. C. Krafft, A. A. Ramoji, C. Bielecki, N. Vogler, T. Meyer, D. Akimov, P. Rösch, M. Schmitt, B. Dietzek, I. Petersen, A. Stallmach and J. Popp, "A comparative Raman and CARS imaging study of colon tissue", Journal of Biophotonics 2(5), 303-312 (2009).
13. M. Harz, R. A. Claus, C. L. Bockmeyer, M. Baum, P. Roesch, K. Kentouche, H.-P. Deigner and J. Popp, "UVresonance Raman spectroscopic study of human plasma of healthy donors and patients with thrombotic microangiopathy", Biopolymers 82(4), 317-324 (2006).
14. M. Harz, M. Kiehntopf, S. Stöckel, P. Rösch, T. Deufel and J. Popp, "Analysis of single blood cells for CSF diagnostics via a combination of fluorescence staining and micro-Raman spectroscopy", Analyst 133(10), 1416-1423 (2008).
15. K. Kneipp, H. Kneipp, I. Itzkan, R. R. Dasari and M. S. Feld, "Surface-enhanced Raman scattering and biophysics", Journal of Physics: Condensed Matter 14, R597-R624 (2002).
16. J. A. Dieringer, A. D. McFarland, N. C. Shah, D. A. Stuart, A. V. Whitney, C. R. Yonzon, M. A. Young, X. Zhang and R. P. Van Duyne, "Surface enhanced Raman spectroscopy: new materials, concepts, characterization tools, and applications", Faraday Discussions 132, 9-26 (2006).
17. B. Pettinger, G. Picardi, R. Schuster and G. Ertl, "Surface-enhanced and STM-tip-enhanced Raman spectroscopy at metal surfaces", Single Molecules 3, 285-294 (2002).
18. M. Baia, F. Toderas, L. Baia, J. Popp and S. Astilean, "Probing the enhancement mechanisms of SERS with paminothiophenol molecules adsorbed on self-assembled gold colloidal nanoparticles", Chemical Physics Letters 422(1-3), 127-132 (2006).
19. K. K. Hering, R. Moller, W. Fritzsche and J. Popp, "Microarray-based detection of dye-labeled DNA by SERRS using particles formed by enzymatic silver deposition", ChemPhysChem 9(6), 867-872 (2008).
20. L. Baia, M. Baia, W. Kiefer, J. Popp and S. Simon," Structural and morphological properties of silver nanoparticles-phosphate glass composites", Chemical Physics 327(1), 63-69 (2006).
21. L. Baia, M. Baia, J. Popp and S. Astilean, "Gold films deposited over regular arrays of polystyrene nanospheres as highly effective SERS substrates from visible to NIR", Journal of Physical Chemistry B 110(47), 23982-23986 (2006).
22. M. Baia, L. Baia, S. Astilean and J. Popp," Surface-enhanced Raman scattering efficiency of truncated tetrahedral Ag nanoparticle arrays mediated by electromagnetic couplings", Applied Physics Letters 88(14), 143121 (2006).
23. D. Cialla, U. Hubner, H. Schneidewind, R. Moller and J. Popp, "Probing innovative microfabricated substrates for their reproducible SERS activity", ChemPhysChem 9(5), 758-762 (2008).
24. K. K. Strelau, T. Schüler, R. Möller, W. Fritzsche and J. Popp, "Novel Bottom-Up SERS Substrates for Quantitative and Parallelized Analytics", ChemPhysChem 11(2), 394-398 (2010).
25. K. Hering, D. Cialla, K. Ackermann, T. Doerfer, R. Moeller, H. Schneidewind, R. Mattheis, W. Fritzsche, P. Roesch and J. Popp, "SERS: a versatile tool in chemical and biochemical diagnostics", Analytical and Bioanalytical Chemistry 390, 113-124 (2008).
26. J. Petschulat, D. Cialla, N. Janunts, C. Rockstuhl, U. Hübner, R. Möller, H. Schneidewind, R. Mattheis, J. Popp, A. Tünnermann, F. Lederer and T. Pertsch, "Doubly resonant optical nanoantenna arrays for polarization resolved measurements of surface-enhanced Raman scattering", Optics Express 18, 4184-4197 (2010).
27. U. Huebner, R. Boucher, H. Schneidewind, D. Cialla and J. Popp, "Microfabricated SERS arrays with sharp-edged metallic nanostructures" , Microelectronic Engineering 85, 1792-1794 (2008).
28. N. Felidj, J. Aubard, G. Levi, J. R. Krenn, A. Hohenau, G. Schider, A. Leitner and F. R. Aussenegg, "Optimized surface-enhanced Raman scattering on gold nanoparticle arrays", Applied Physics Letters 82, 3095-3097 (2003).
29. L. Gunnarsson, E. J. Bjerneld, H. Xu, S. Petronis, B. Kasemo and M. Kall, "Interparticle coupling effects in nanofabricated substrates for surface-enhanced Raman scattering", Applied Physics Letters 78, 802-804 (2001).
30. M. Sackmann, S. Bom, T. Balster and A. Materny, "Nanostructured gold surfaces as reproducible substrates for surface-enhanced Raman spectroscopy", Journal of Raman Spectroscopy 38, 277-282 (2007).
31. E. C. Le Ru, E. Blackie, M. Meyer and P. G. Etchegoin, "Surface Enhanced Raman Scattering Enhancement Factors: A Comprehensive Study", Journal of Physical Chemistry C 111, 13794-13803 (2007).
32. D. Cialla, R. Siebert, U. Hübner, R. Möller, H. Schneidewind, R. Mattheis, J. Petschulat, A. Tünnermann, T. Pertsch, B. Dietzek and J. Popp, "Ultrafast plasmon dynamics and evanescent field distribution of reproducible surface-enhanced Raman-scattering substrates", Analytical and Bioanalytical Chemistry 394, 1811-1818 (2009).