Microfabricated SERS-arrays with sharp-edged metallic nanostructures

Microelectronic Engineering

Volumn 85, Issue 8, 2008, Pages 1792-1794

  Huebner, Uwe ^a   Boucher, R ^a   Schneidewind, H ^a   Cialla, D ^b   Popp, J ^a,b  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

E beam lithography; Plasma etching; Plasmonic; Surface enhanced Raman spectroscopy

Indexed keywords

ARCHITECTURAL ACOUSTICS; ELECTRON BEAM LITHOGRAPHY; GOLD; METALLIC SOAPS; NANOSTRUCTURES; OPTICAL DESIGN; SUBSTRATES; SURFACES;

E BEAM LITHOGRAPHY; FABRICATION ROUTES; FIELD SIZE; ION BEAM ETCHING (IBE); METALLIC NANOSTRUCTURES; SHARP EDGES; SURFACE-ENHANCED RAMAN SPECTROSCOPY (SUERS);

VACUUM EVAPORATION;

GEOMETRY; GOLD; SUBSTRATES; SURFACES;

EID: 48949116039     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.05.005     Document Type: Article

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